ellipsometry

椭圆光度法
  • 文章类型: Journal Article
    由相对于表面法线的入射角在60°至80°之间的Si(111)单晶上的2kV镓离子产生规则的波型。结构化表面的特征波长和表面粗糙度被确定为在35-75nm和0.5-2.5nm之间。还研究了所创建的周期性结构的局部斜率分布。将这些地形结果与Bradley-Harper模型的预测进行了比较。通过光谱椭偏仪研究了无定形的表面层。根据结果,非晶化的厚度作为离子入射角的函数在8nm至4nm的范围内变化。使用椭偏结果模拟结构化表面的反射率,并用反射计进行测量。根据光谱,在460nm波长的Si(111)上可以实现在45%和50%内的反射率的受控改变。根据测量结果,硅的特征尺寸(周期性和振幅)和光学性质可以通过低能聚焦离子辐照在给定的入射角间隔进行微调。
    Regular wave patterns were created by a 2 kV gallium ion on Si(111) monocrystals at incidence angles between 60° and 80° with respect to the surface normal. The characteristic wavelength and surface roughness of the structured surfaces were determined to be between 35-75 nm and 0.5-2.5 nm. The local slope distribution of the created periodic structures was also studied. These topography results were compared with the predictions of the Bradley-Harper model. The amorphised surface layers were investigated by a spectroscopic ellipsometer. According to the results, the amorphised thicknesses were changed in the range of 8 nm to 4 nm as a function of ion incidence angles. The reflectance of the structured surfaces was simulated using ellipsometric results and measured with a reflectometer. Based on the spectra, a controlled modification of reflectance within 45% and 50% can be achieved on Si(111) at 460 nm wavelength. According to the measured results, the characteristic sizes (periodicity and amplitude) and optical property of silicon can be fine-tuned by low-energy focused ion irradiation at the given interval of incidence angles.
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  • 文章类型: Journal Article
    由于Al掺杂均匀性差等缺点,精确控制厚度,无法保形沉积在高纵横比装置和高针孔率,Al掺杂ZnO(AZO)纳米膜在集成光电器件中的应用受到了显着影响。这里,我们报告了使用集成光谱椭偏仪在AZO纳米膜的原子层沉积(ALD)过程中的原位监测。通过对沉积过程的实时和精确的原子级监测来沉积具有不同组成的AZO纳米膜。我们特别研究了ALD工艺期间的半反应和厚度演变,并且还公开了室温度的影响。结构特征表明,未经任何后处理获得的AZO纳米膜是均匀的,致密且无针孔。纳米膜在可见光范围内的透射率>94%,最佳电导率可达1210S/cm。当前研究的成果可能为AZO纳米膜在集成光电器件中的应用铺平道路。
    Due to shortcomings such as poor homogeneity of Al doping, precisely controlling the thickness, inability to conformally deposit on high aspect ratio devices and high pinhole rate, the applications of Al-doped ZnO (AZO) nanomembrane in integrated optoelectronic devices are remarkably influenced. Here, we report in situ monitoring during the atomic layer deposition (ALD) of AZO nanomembrane by using an integrated spectroscopic ellipsometer. AZO nanomembranes with different compositions were deposited with real-time and precise atomic level monitoring of the deposition process. We specifically investigate the half reaction and thickness evolution during the ALD processes and the influence of the chamber temperature is also disclosed. Structural characterizations demonstrate that the obtained AZO nanomembranes without any post-treatment are uniform, dense and pinhole-free. The transmittances of the nanomembranes in visible range are > 94%, and the optimal conductivity can reach up to 1210 S/cm. The output of current research may pave the way for AZO nanomembrane becoming promising in integrated optoelectronic devices.
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  • 文章类型: Journal Article
    表面活性剂对流体界面的吸附发生在许多技术和日常生活环境中。所形成的吸附层在界面处的覆盖率和其它性质决定了表面活性剂在所需应用方面的性能。鉴于这些应用的重要性,对表面活性剂吸附层的全面表征和理解有很大的需求。在这次审查中,我们提供了合适的实验和基于模拟的技术的概述,并回顾了用于研究表面活性剂吸附层的文献。我们得出的结论是,虽然这些技术已成功应用于研究水不溶性表面活性剂的Langmuir单层,它们在水溶性表面活性剂吉布斯吸附层研究中的应用尚未得到充分开发。最后,我们强调这些方法的巨大潜力,提供了一个更深入的了解可溶性表面活性剂在界面的行为,这对于优化它们在各种应用中的性能至关重要。
    Adsorption of surfactants to fluid interfaces occurs in numerous technological and daily-life contexts. The coverage at the interface and other properties of the formed adsorption layers determine the performance of a surfactant with regard to the desired application. Given the importance of these applications, there is a great demand for the comprehensive characterization and understanding of surfactant adsorption layers. In this review, we provide an overview of suitable experimental and simulation-based techniques and review the literature in which they were used for the investigation of surfactant adsorption layers. We come to the conclusion that, while these techniques have been successfully applied to investigate Langmuir monolayers of water-insoluble surfactants, their application to the study of Gibbs adsorption layers of water-soluble surfactants has not been fully exploited. Finally, we emphasize the great potential of these methods in providing a deeper understanding of the behavior of soluble surfactants at interfaces, which is crucial for optimizing their performance in various applications.
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  • 文章类型: Journal Article
    弥漫性软物质界面有多种形式,从末端束缚的聚合物刷或吸附的表面活性剂到自组装的脂质层。这些接口在众多领域发挥着至关重要的作用,包括材料科学,生物物理学,和纳米技术。了解这些界面的纳米结构和特性对于优化其性能和设计新型功能材料至关重要。近年来,反射技术,特别是中子反射计,已成为强大的工具,可以以惊人的精度和深度阐明软物质界面的复杂纳米结构。这篇综述概述了反射计的最新发展及其在照射漫射界面纳米结构方面的应用。我们探索中子和X射线反射的各种原理和方法,以及椭圆光度法,并讨论其实验设置和数据分析方法的进展。对实验中子反射测量方法的改进使动力学测量和剪切或约束下的扩散结构的阐明具有更大的时间分辨率,虽然分析协议的创新大大减少了数据处理时间,促进了来自多个仪器的反射计数据的共同改进,并为拟议的结构模型提供了比以往任何时候都更大的信心。此外,我们强调了这些技术带来的一些重要的研究成果,揭示了组织,动力学,和纳米级的界面现象。我们还讨论了反射计技术的未来方向和潜在进步。通过在漫射界面的纳米结构上发光,反射技术能够合理设计和定制具有增强的属性和功能的接口。
    Diffuse soft matter interfaces take many forms, from end-tethered polymer brushes or adsorbed surfactants to self-assembled layers of lipids. These interfaces play crucial roles across a multitude of fields, including materials science, biophysics, and nanotechnology. Understanding the nanostructure and properties of these interfaces is fundamental for optimising their performance and designing novel functional materials. In recent years, reflectometry techniques, in particular neutron reflectometry, have emerged as powerful tools for elucidating the intricate nanostructure of soft matter interfaces with remarkable precision and depth. This review provides an overview of selected recent developments in reflectometry and their applications for illuminating the nanostructure of diffuse interfaces. We explore various principles and methods of neutron and X-ray reflectometry, as well as ellipsometry, and discuss advances in their experimental setups and data analysis approaches. Improvements to experimental neutron reflectometry methods have enabled greater time resolution in kinetic measurements and elucidation of diffuse structure under shear or confinement, while innovation in analysis protocols has significantly reduced data processing times, facilitated co-refinement of reflectometry data from multiple instruments and provided greater-than-ever confidence in proposed structural models. Furthermore, we highlight some significant research findings enabled by these techniques, revealing the organisation, dynamics, and interfacial phenomena at the nanoscale. We also discuss future directions and potential advancements in reflectometry techniques. By shedding light on the nanostructure of diffuse interfaces, reflectometry techniques enable the rational design and tailoring of interfaces with enhanced properties and functionalities.
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  • 文章类型: Journal Article
    单层材料通常显示出有趣的温度依赖性介电和光学特性,这对于改善相关设备的结构和功能至关重要。由于其独特的光电能力,单层WSe2最近在原子级薄电子学和光电子学领域受到了很多关注。在这项工作中,我们专注于单层WSe2在0.74至6.40eV的能量和40至350K的温度下随温度变化的介电函数(ε=ε1iε2)的演变。我们分析了ε相对于能量的二阶导数,以精确定位临界点(CP)。观察到的CP能量对温度的依赖性与随着温度升高而下降的激子结合能的替代支配相一致。
    Monolayer materials typically display intriguing temperature-dependent dielectric and optical properties, which are crucial for improving the structure and functionality of associated devices. Due to its unique photoelectric capabilities, monolayer WSe2 has recently received a lot of attention in the fields of atomically thin electronics and optoelectronics. In this work, we focus on the evolution of the temperature-dependent dielectric function (ε = ε1 + i ε2) of monolayer WSe2 over energies from 0.74 to 6.40 eV and temperatures from 40 to 350 K. We analyze the second derivatives of ε with respect to energy to accurately locate the critical points (CP). The dependence of the observed CP energies on temperature is consistent with the alternative domination of the declining exciton binding energy as the temperature increases.
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  • 文章类型: Journal Article
    软界面蛋白质主题的历史可以追溯到19世纪,直到今天,它不断吸引着巨大的科学兴趣。已经开发了许多实验方法和理论方法来服务于胶体和界面科学这一领域的研究进展。包括泡沫和乳液等软胶体的区域。从表面张力吸附等温线等经典方法来看,铺展层的表面压力-面积测量,和表面流变学探测吸附动力学,如今,基于光谱学的先进表面敏感技术,显微镜,和光线的反射,液体/流体界面处的X射线和中子提供了重要的补充信息源。除了蛋白质吸附层的基本特征,即,表面张力和表面过量,这些层的纳米级结构以及界面蛋白质的构象和形态对于扩展对该主题的理解深度至关重要。在这篇评论文章中,我们对三种方法的应用进行了广泛的概述,即,椭圆光度法,X射线反射仪和中子反射仪,用于水/空气和水/油界面上蛋白质的吸附和结构研究。主要注意力放在实验方法的发展上,以及在显着的实验结果方面对相关成就的讨论。我们试图用这些技术涵盖蛋白质研究的整个历史,因此,我们认为,这篇评论应该作为一个有价值的参考,为不同科学领域的广泛研究人员提供灵感,在这些领域,软界面上的蛋白质可能是相关的。
    The history of the topic of proteins at soft interfaces dates back to the 19th century, and until the present day, it has continuously attracted great scientific interest. A multitude of experimental methods and theoretical approaches have been developed to serve the research progress in this large domain of colloid and interface science, including the area of soft colloids such as foams and emulsions. From classical methods like surface tension adsorption isotherms, surface pressure-area measurements for spread layers, and surface rheology probing the dynamics of adsorption, nowadays, advanced surface-sensitive techniques based on spectroscopy, microscopy, and the reflection of light, X-rays and neutrons at liquid/fluid interfaces offers important complementary sources of information. Apart from the fundamental characteristics of protein adsorption layers, i.e., surface tension and surface excess, the nanoscale structure of such layers and the interfacial protein conformations and morphologies are of pivotal importance for extending the depth of understanding on the topic. In this review article, we provide an extensive overview of the application of three methods, namely, ellipsometry, X-ray reflectometry and neutron reflectometry, for adsorption and structural studies on proteins at water/air and water/oil interfaces. The main attention is placed on the development of experimental approaches and on a discussion of the relevant achievements in terms of notable experimental results. We have attempted to cover the whole history of protein studies with these techniques, and thus, we believe the review should serve as a valuable reference to fuel ideas for a wide spectrum of researchers in different scientific fields where proteins at soft interface may be of relevance.
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  • 文章类型: Journal Article
    水凝胶通常被描述为具有不同表面的均质聚合物嵌段。虽然经常研究聚合物结构中的缺陷,水凝胶表面的结构不规则性通常被忽略。在这项工作中,约100纳米厚度的薄的水凝胶层(纳米凝胶)已被合成并表征其结构不规则性,因为它们代表了大分子凝胶的表面。纳米凝胶包含主链响应性(热响应性)和交联点的响应性(氧化还原响应性)。在使用盒模型和两段模型分析组合椭圆光度法的数据时,以及原子力显微镜,可以开发更明确的纳米凝胶表面模型。从二氧化硅晶片表面更密集的交联网络开始,交联密度朝着水凝胶-溶剂界面逐渐降低。主链的热响应行为同等地影响整个网络,因为所有链段改变溶解度。基于交联剂的氧化还原反应性,另一方面,只受内心支配,网络的更多交叉链接层。因此,这种双响应性纳米凝胶允许开发来自自由基聚合的水凝胶表面的更详细的模型。它可以更好地理解水凝胶中的结构缺陷以及它们如何受到响应功能的影响。本文受版权保护。保留所有权利。
    Hydrogels are usually depicted as a homogenous polymer block with a distinct surface. While defects in the polymer structure are looked into frequently, structural irregularities on the hydrogel surface are often neglected. In this work, thin hydrogel layers of ≈100 nm thickness (nanogels) are synthesized and characterized for their structural irregularities, as they represent the surface of macrogels. The nanogels contain a main-chain responsiveness (thermo responsive) and a responsiveness in the cross-linking points (redox responsive). By combining data from ellipsometry using box-model and two-segment-model analysis, as well as atomic force microscopy, a more defined model of the nanogel surface can be developed. Starting with a more densely cross-linked network at the silica wafer surface, the density of cross-linking gradually decreases toward the hydrogel-solvent interface. Thermo-responsive behavior of the main chain affects the entire network equally as all chain segments change solubility. Cross-linker-based redox-responsiveness, on the other hand, is only governed by the inner, more cross-linked layers of the network. Such dual responsive nanogels hence allow for developing a more detailed model of a hydrogel surface from free radical polymerization. It provides a better understanding of structural defects in hydrogels and how they are affected by responsive functionalities.
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  • 文章类型: Journal Article
    在这项研究中,提出了通过等离子体增强化学气相沉积(PECVD)沉积的聚合物状(SiOxCyHz)薄膜的宽光谱范围内的光学研究。主要的焦点是评估生长膜的均匀性。在PECVD中,例如,可以通过连续地调整沉积工艺参数来改变沉积材料的性质,并且因此允许不均匀层的生长。然而,如这项研究所示,同质层的生长可能同样具有挑战性。这一挑战在沉积过程开始时尤其明显,在有必要考虑基材的影响以及其他因素的情况下,即使沉积条件的轻微变化也会导致不均匀层的形成。为了产生均匀的层,在硅衬底上沉积了几个系列的聚合物状薄膜,即所有沉积参数保持恒定。对这些样品进行了光学表征,对均匀性具有特殊的兴趣,尤其是在成长的初期。发现最初的不均匀生长总是存在的。发现初始不均匀部分的厚度令人惊讶地大。
    In this study, an optical investigation in a wide spectral range of polymer-like (SiOxCyHz) thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) is presented. The primary focus is on assessing the homogeneity of the grown films. Within the PECVD, it is possible to alter the properties of the deposited material by continually adjusting deposition process parameters and hence allow for the growth of inhomogeneous layers. However, as shown in this study, the growth of homogeneous layers could be similarly challenging. This challenge is especially pronounced at the beginning of the deposition process, where it is necessary to consider the influence of the substrate among other factors, as even slight variations in the deposition conditions can lead to the formation of inhomogeneous layers. Several series of polymer-like thin films were deposited onto silicon substrates with the goal of producing homogeneous layers, i.e. all deposition parameters were held constant. These samples were optically characterized with a special interest in homogeneity, especially at the beginning of the growth. It was found that initial inhomogeneous growth is always present. The thickness of the initial inhomogeneous part was found to be surprisingly large.
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  • 文章类型: Journal Article
    聚对苯二甲酸乙二醇酯(PET)薄膜是深入研究的主题,因为在应用中使用它们的极大兴趣,尤其是在医学上。从光学的角度来看,具有低拉伸程度的PET薄膜可以被认为是单轴材料,线性双折射及其色散的测定是非常重要的。此处应用了两种方法来估计这些参数:椭圆光度法和通道光谱法。椭圆光度法使用单色辐射;因此,对于给定的辐射波长值,测定PET膜的线性双折射。通道光谱方法允许估计可见光谱中大范围波长的线性双折射及其色散。记录了两个参数随波长增加而降低的情况。为了证明PET薄膜的微观结构和伸长引起的构象变化,并评估取向程度,进行了衰减全反射(ATR-FTIR)模式的偏振红外光谱研究。二色性比(在相对于拉伸方向平行和正交的线性偏振辐射测量的吸光度之间,分别),并测量了拉伸和未拉伸PET样品的纵向(MD)和横向(TD)配置的ATR吸光度比。
    Polyethylene terephthalate (PET) films are the subject of intensive research because of great interest in using them in applications, especially in medicine. From an optical point of view, PET films with a low degree of stretching can be considered uniaxial materials, for which the determination of the linear birefringence and its dispersion is very important. Two methods were applied here for the estimation of these parameters: the ellipsometric method and the channeled spectra method. The ellipsometric method uses monochromatic radiation; therefore, the linear birefringence of the PET films is determined for a given value of the radiation wavelength. The channeled spectra method allows for the estimation of the linear birefringence and its dispersion for a large range of wavelengths in the visible spectrum. A decrease in both parameters with the increase in the wavelength was recorded. To evidence the microstructure of PET films and the conformational changes induced by elongation and to evaluate the degree of orientation, a polarized infrared spectral study in attenuated total reflection (ATR-FTIR) mode was performed. The dichroic ratio (between the absorbance measured with linearly polarized radiation parallel and orthogonal relative to the stretching direction, respectively) and the ATR absorbance ratio for the machine direction (MD) and transversal direction (TD) configurations both for the stretched and unstretched PET samples were measured.
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  • 文章类型: Journal Article
    在这项工作中,我们通过绘制状态图,讨论了有效介质近似(EMA)模型在光谱椭圆偏振(SE)数据分析中的精度。通过严格的耦合波分析求解了EMA模型的SE参数Φ(振幅比)和Δ(相位差)。用时域有限差分法模拟了具有微粗糙度的实际表面的电磁响应,实验结果验证了这一点。通过将实际值与模型值进行比较,绘制了与EMA模型的SE参数以及光学常数n(折射率)和k(消光系数)相关的状态图。我们发现,使用EMA对具有高吸收的微粗糙表面进行建模可以导致振幅比和消光系数的更高精度。Φ的精度,Δ,n和k随着相对粗糙度σ/λ(σ:均方根粗糙度,λ:入射波长)减小。Φ的精度影响k的精度,Δ的精度影响n的精度。仅改变σ对SE参数和光学常数的相对误差的状态图影响不大。绘制状态图的优越优点是它能够清楚地确定EMA是否能够对粗糙表面建模。
    In this work, we discuss the precision of the effective medium approximation (EMA) model in the data analysis of spectroscopic ellipsometry (SE) for solid materials with micro-rough surfaces by drawing the regime map. The SE parameters ψ (amplitude ratio) and Δ (phase difference) of the EMA model were solved by rigorous coupled-wave analysis. The electromagnetic response of the actual surfaces with micro roughness was simulated by the finite-difference time-domain method, which was validated by the experimental results. The regime maps associated with the SE parameters and optical constants n (refractive index) and k (extinction coefficient) of the EMA model were drawn by a comparison of the actual values with the model values. We find that using EMA to model micro-rough surfaces with high absorption can result in a higher precision of the amplitude ratio and extinction coefficient. The precisions of ψ, Δ, n and k increase as the relative roughness σ/λ (σ: the root mean square roughness, λ: the incident wavelength) decreases. The precision of ψ has an influence on the precision of k and the precision of Δ affects the precision of n. Changing σ alone has little effect on the regime maps of the relative errors of SE parameters and optical constants. A superior advantage of drawing the regime map is that it enables the clear determination as to whether EMA is able to model the rough surfaces or not.
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