ellipsometry

椭圆光度法
  • 文章类型: Journal Article
    近年来,手持式和便携式太赫兹仪器已经在快速发展的各种应用范围从无损检测到生物医学成像和传感。例如,我们已经部署了便携式手持光谱反射(PHASR)扫描仪,用于在手术室环境中的大型动物模型中对皮肤烧伤进行体内全光谱成像。在本文中,我们首次推出了PHASR扫描仪的极化版本,并描述了一种通用的校准技术,以映射成像扫描仪的Jones矩阵在其视场中的空间和光谱依赖性。我们的设计基于在PHASR扫描仪外壳中通过偏振分束器分离的两个正交光电导天线(PCA)检测器的放置。我们表明,对特征良好的偏振校准目标的仅三个独立测量就足以确定入射光束在样品位置的偏振状态,以及从样品位置到检测器提取琼斯传播矩阵。我们通过验证从旋转到各个角度的双折射晶体获得的偏振测量结果来测试扫描仪的准确性,与样品的理论预测响应相比。此新版本的PHASR扫描仪可用于高速成像和研究该领域中偏振敏感样品的异质性。
    In recent years, handheld and portable terahertz instruments have been in rapid development for various applications ranging from non-destructive testing to biomedical imaging and sensing. For instance, we have deployed our Portable Handheld Spectral Reflection (PHASR) Scanners for in vivo full-spectroscopic imaging of skin burns in large animal models in operating room settings. In this paper, we debut the polarimetric version of the PHASR Scanner, and describe a generalized calibration technique to map the spatial and spectral dependence of the Jones matrix of an imaging scanner across its field of view. Our design is based on placement of two orthogonal photoconductive antenna (PCA) detectors separated by a polarizing beam splitter in the PHASR Scanner housing. We show that as few as three independent measurements of a well-characterized polarimetric calibration target are sufficient to determine the polarization state of the incident beam at the sample location, as well as to extract the Jones propagation matrix from the sample location to the detectors. We have tested the accuracy of our scanner by validating polarimetric measurements obtained from a birefringent crystal rotated to various angles, as compared to the theoretically predicted response of the sample. This new version of our PHASR scanner can be used for high-speed imaging and investigation of heterogeneity of polarization-sensitive samples in the field.
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  • 文章类型: Journal Article
    由相对于表面法线的入射角在60°至80°之间的Si(111)单晶上的2kV镓离子产生规则的波型。结构化表面的特征波长和表面粗糙度被确定为在35-75nm和0.5-2.5nm之间。还研究了所创建的周期性结构的局部斜率分布。将这些地形结果与Bradley-Harper模型的预测进行了比较。通过光谱椭偏仪研究了无定形的表面层。根据结果,非晶化的厚度作为离子入射角的函数在8nm至4nm的范围内变化。使用椭偏结果模拟结构化表面的反射率,并用反射计进行测量。根据光谱,在460nm波长的Si(111)上可以实现在45%和50%内的反射率的受控改变。根据测量结果,硅的特征尺寸(周期性和振幅)和光学性质可以通过低能聚焦离子辐照在给定的入射角间隔进行微调。
    Regular wave patterns were created by a 2 kV gallium ion on Si(111) monocrystals at incidence angles between 60° and 80° with respect to the surface normal. The characteristic wavelength and surface roughness of the structured surfaces were determined to be between 35-75 nm and 0.5-2.5 nm. The local slope distribution of the created periodic structures was also studied. These topography results were compared with the predictions of the Bradley-Harper model. The amorphised surface layers were investigated by a spectroscopic ellipsometer. According to the results, the amorphised thicknesses were changed in the range of 8 nm to 4 nm as a function of ion incidence angles. The reflectance of the structured surfaces was simulated using ellipsometric results and measured with a reflectometer. Based on the spectra, a controlled modification of reflectance within 45% and 50% can be achieved on Si(111) at 460 nm wavelength. According to the measured results, the characteristic sizes (periodicity and amplitude) and optical property of silicon can be fine-tuned by low-energy focused ion irradiation at the given interval of incidence angles.
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  • 文章类型: Journal Article
    单层材料通常显示出有趣的温度依赖性介电和光学特性,这对于改善相关设备的结构和功能至关重要。由于其独特的光电能力,单层WSe2最近在原子级薄电子学和光电子学领域受到了很多关注。在这项工作中,我们专注于单层WSe2在0.74至6.40eV的能量和40至350K的温度下随温度变化的介电函数(ε=ε1iε2)的演变。我们分析了ε相对于能量的二阶导数,以精确定位临界点(CP)。观察到的CP能量对温度的依赖性与随着温度升高而下降的激子结合能的替代支配相一致。
    Monolayer materials typically display intriguing temperature-dependent dielectric and optical properties, which are crucial for improving the structure and functionality of associated devices. Due to its unique photoelectric capabilities, monolayer WSe2 has recently received a lot of attention in the fields of atomically thin electronics and optoelectronics. In this work, we focus on the evolution of the temperature-dependent dielectric function (ε = ε1 + i ε2) of monolayer WSe2 over energies from 0.74 to 6.40 eV and temperatures from 40 to 350 K. We analyze the second derivatives of ε with respect to energy to accurately locate the critical points (CP). The dependence of the observed CP energies on temperature is consistent with the alternative domination of the declining exciton binding energy as the temperature increases.
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  • 文章类型: Journal Article
    在这项研究中,提出了通过等离子体增强化学气相沉积(PECVD)沉积的聚合物状(SiOxCyHz)薄膜的宽光谱范围内的光学研究。主要的焦点是评估生长膜的均匀性。在PECVD中,例如,可以通过连续地调整沉积工艺参数来改变沉积材料的性质,并且因此允许不均匀层的生长。然而,如这项研究所示,同质层的生长可能同样具有挑战性。这一挑战在沉积过程开始时尤其明显,在有必要考虑基材的影响以及其他因素的情况下,即使沉积条件的轻微变化也会导致不均匀层的形成。为了产生均匀的层,在硅衬底上沉积了几个系列的聚合物状薄膜,即所有沉积参数保持恒定。对这些样品进行了光学表征,对均匀性具有特殊的兴趣,尤其是在成长的初期。发现最初的不均匀生长总是存在的。发现初始不均匀部分的厚度令人惊讶地大。
    In this study, an optical investigation in a wide spectral range of polymer-like (SiOxCyHz) thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) is presented. The primary focus is on assessing the homogeneity of the grown films. Within the PECVD, it is possible to alter the properties of the deposited material by continually adjusting deposition process parameters and hence allow for the growth of inhomogeneous layers. However, as shown in this study, the growth of homogeneous layers could be similarly challenging. This challenge is especially pronounced at the beginning of the deposition process, where it is necessary to consider the influence of the substrate among other factors, as even slight variations in the deposition conditions can lead to the formation of inhomogeneous layers. Several series of polymer-like thin films were deposited onto silicon substrates with the goal of producing homogeneous layers, i.e. all deposition parameters were held constant. These samples were optically characterized with a special interest in homogeneity, especially at the beginning of the growth. It was found that initial inhomogeneous growth is always present. The thickness of the initial inhomogeneous part was found to be surprisingly large.
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  • 文章类型: Journal Article
    聚对苯二甲酸乙二醇酯(PET)薄膜是深入研究的主题,因为在应用中使用它们的极大兴趣,尤其是在医学上。从光学的角度来看,具有低拉伸程度的PET薄膜可以被认为是单轴材料,线性双折射及其色散的测定是非常重要的。此处应用了两种方法来估计这些参数:椭圆光度法和通道光谱法。椭圆光度法使用单色辐射;因此,对于给定的辐射波长值,测定PET膜的线性双折射。通道光谱方法允许估计可见光谱中大范围波长的线性双折射及其色散。记录了两个参数随波长增加而降低的情况。为了证明PET薄膜的微观结构和伸长引起的构象变化,并评估取向程度,进行了衰减全反射(ATR-FTIR)模式的偏振红外光谱研究。二色性比(在相对于拉伸方向平行和正交的线性偏振辐射测量的吸光度之间,分别),并测量了拉伸和未拉伸PET样品的纵向(MD)和横向(TD)配置的ATR吸光度比。
    Polyethylene terephthalate (PET) films are the subject of intensive research because of great interest in using them in applications, especially in medicine. From an optical point of view, PET films with a low degree of stretching can be considered uniaxial materials, for which the determination of the linear birefringence and its dispersion is very important. Two methods were applied here for the estimation of these parameters: the ellipsometric method and the channeled spectra method. The ellipsometric method uses monochromatic radiation; therefore, the linear birefringence of the PET films is determined for a given value of the radiation wavelength. The channeled spectra method allows for the estimation of the linear birefringence and its dispersion for a large range of wavelengths in the visible spectrum. A decrease in both parameters with the increase in the wavelength was recorded. To evidence the microstructure of PET films and the conformational changes induced by elongation and to evaluate the degree of orientation, a polarized infrared spectral study in attenuated total reflection (ATR-FTIR) mode was performed. The dichroic ratio (between the absorbance measured with linearly polarized radiation parallel and orthogonal relative to the stretching direction, respectively) and the ATR absorbance ratio for the machine direction (MD) and transversal direction (TD) configurations both for the stretched and unstretched PET samples were measured.
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  • 文章类型: Journal Article
    在这项工作中,我们通过绘制状态图,讨论了有效介质近似(EMA)模型在光谱椭圆偏振(SE)数据分析中的精度。通过严格的耦合波分析求解了EMA模型的SE参数Φ(振幅比)和Δ(相位差)。用时域有限差分法模拟了具有微粗糙度的实际表面的电磁响应,实验结果验证了这一点。通过将实际值与模型值进行比较,绘制了与EMA模型的SE参数以及光学常数n(折射率)和k(消光系数)相关的状态图。我们发现,使用EMA对具有高吸收的微粗糙表面进行建模可以导致振幅比和消光系数的更高精度。Φ的精度,Δ,n和k随着相对粗糙度σ/λ(σ:均方根粗糙度,λ:入射波长)减小。Φ的精度影响k的精度,Δ的精度影响n的精度。仅改变σ对SE参数和光学常数的相对误差的状态图影响不大。绘制状态图的优越优点是它能够清楚地确定EMA是否能够对粗糙表面建模。
    In this work, we discuss the precision of the effective medium approximation (EMA) model in the data analysis of spectroscopic ellipsometry (SE) for solid materials with micro-rough surfaces by drawing the regime map. The SE parameters ψ (amplitude ratio) and Δ (phase difference) of the EMA model were solved by rigorous coupled-wave analysis. The electromagnetic response of the actual surfaces with micro roughness was simulated by the finite-difference time-domain method, which was validated by the experimental results. The regime maps associated with the SE parameters and optical constants n (refractive index) and k (extinction coefficient) of the EMA model were drawn by a comparison of the actual values with the model values. We find that using EMA to model micro-rough surfaces with high absorption can result in a higher precision of the amplitude ratio and extinction coefficient. The precisions of ψ, Δ, n and k increase as the relative roughness σ/λ (σ: the root mean square roughness, λ: the incident wavelength) decreases. The precision of ψ has an influence on the precision of k and the precision of Δ affects the precision of n. Changing σ alone has little effect on the regime maps of the relative errors of SE parameters and optical constants. A superior advantage of drawing the regime map is that it enables the clear determination as to whether EMA is able to model the rough surfaces or not.
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  • 文章类型: Journal Article
    为了成功构建半导体器件,半导体工业必须测量基本材料参数,特别是在开发新材料时;测量材料的生长质量;准确确定薄膜的细节,量子阱,和控制或影响器件性能的其他微结构;以及测量器件本身的性能。需要确定的属性,因此,包括基本能带结构和传输参数,例如能隙值和载流子散射时间;杂质和缺陷的存在和浓度;合金参数;层厚度;材料在复杂结构中的分布;和许多其他。这个过程确定了广泛的材料,结构,和设备参数称为表征。半导体行业使用许多表征方法,这些方法利用电气,化学,和其他方法。其中,光学表征技术,定义为使用紫外线到远红外线的电磁辐射,脱颖而出,因为他们电弧无损,需要最少的样品制备,因为没有接触电弧需要。这些特征对于生产使用或检查成品设备非常重要。另一个好处是,与需要固定触点的电气方法不同,光学技术可以给出半导体晶片范围内的属性的二维或三维图。本文描述的六种技术(旋光术,红外光谱,显微镜,调制光谱学,光致发光,和拉曼散射)之所以选择,是因为它们目前或可能在行业中广泛使用;它们测量广泛的半导体参数;并且它们在电磁频谱的不同区域中运行。对每种技术的讨论指出了测得的基本半导体量,给出了该技术的科学依据,并指出测量是如何进行的。详细讨论了文献中的说明性例子,显示重要半导体材料的应用。更多信息可以从所包括的参考文献的详细列表中获得。
    To successfully construct semiconductor devices, the semiconductor industry must measure fundamental material parameters, especially when developing new materials; measure the quality of the material as it is grown; accurately determine the details of thin films, quantum wells, and other microstructures that control or affect device performance; and measure properties of the devices themselves. Properties that need to be determined, therefore, include basic band structure and transport parameters, such as energy gap values and carrier scattering times; the presence and concentration of impurities and defects; alloy parameters; layer thicknesses; the distribution of materials in complex structures; and many others. This process of determining a wide range of material, structural, and device parameters is called characterization. The semiconductor industry uses many characterization methods which draw on electrical, chemical, and other approaches. Among these, optical characterization techniques, defined as those using electromagnetic radiation from the ultraviolet to the far infrared, stand out because they arc nondestructive and require minimal sample preparation since no contacts arc needed. These features arc of great importance for production use or to examine finished devices. Another benefit is that, unlike electrical methods which require fixed contacts, optical techniques can give two- or three-dimensional maps of properties over the extent of a semiconductor wafer. The six techniques described in this paper (cllipsometry, infrared spectroscopy, microscopy, modulation spectroscopy, photolumincscence, and Raman scattering) were chosen because they are currently or potentially widely used in the industry; they measure a broad array of semiconductor parameters; and they operate in different regions of the electromagnetic spectrum. The discussion of each technique indicates the basic semiconductor quantities measured, gives the scientific basis of the technique, and indicates how the measurement is made. Illustrative examples from the literature are discussed in detail, showing applications to important semiconductor materials. More information can be obtained from the detailed list of references included.
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  • 文章类型: Journal Article
    多孔阳极氧化铝(PAAO),有时被称为纳米多孔阳极氧化铝,在科学和工程的许多领域中作为纳米加工的成本有效的模板。然而,在光学亚波长范围内具有精确厚度的超薄PAAO膜的生产仍然具有挑战性,因为在阳极氧化的初始阶段很难进行过程控制。在这项研究中,我们展示了一致制造具有目标厚度的PAAO的技术。设计了具有光学窗口的电化学电池,用于阳极氧化过程中PAAO的反射光谱。将光谱实时拟合到转移矩阵模型可以连续监测PAAO层的厚度增长。自动化软件被设计为在预设的PAAO厚度值下终止阳极氧化过程。虽然使用广泛使用的阳极氧化方法在电位为40V的0.3M草酸电解质中说明了该概念,它可以很容易地定制其他协议。具有低于300nm的有效厚度的PAAO层可以使用单晶铝衬底以几纳米的精度生产。使用光谱椭圆偏振法确认结果。在阳极氧化过程中控制厚度的方法消除了对电子显微镜进行样品切片的必要性,并且对于基于PAAO的功能光学涂层的小规模生产特别有价值。
    Porous anodic aluminum oxide (PAAO), sometimes referred to as nanoporous anodic alumina, serves as a cost-effective template for nanofabrication in many fields of science and engineering. However, production of ultrathin PAAO membranes with precise thickness in the optical sub-wavelength range remains challenging because of difficulties regarding process control at the initial stage of anodic oxidation. In this study, we demonstrate a technique for consistently manufacturing PAAO with the targeted thickness. An electrochemical cell with an optical window was designed for reflectance spectroscopy of PAAO during anodization. Real-time fitting of spectra to a transfer-matrix model enabled continuous monitoring of the thickness growth of the PAAO layer. Automation software was designed to terminate the anodization process at preset PAAO thickness values. While the concept was illustrated using the widely used method of anodization in a 0.3 M oxalic acid electrolyte with a 40 V potential, it can be readily customized for other protocols. PAAO layers with effective thickness below 300 nm could be produced with a few nanometers accuracy using single-crystal aluminum substrates. The results were confirmed using spectroscopic ellipsometry. The method for controlling the thickness during anodization eliminates the necessity of sample sectioning for electron microscopy and is particularly valuable for the small-scale production of PAAO-based functional optical coatings.
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  • 文章类型: Journal Article
    第一次,基于双(8-羟基喹啉)锌的有机发光二极管(OLED),其苯乙烯基(ZnStq)分散在聚(N-乙烯基咔唑)基质中(ZnStq_R:PVK,其中R=H,Cl,制造了OCH3)。通过旋涂方法制备的ZnStq_R:PVK薄膜被用作这些器件中的有源层。对于ZnStq_H:PVK,所产生的OLED在590、587和578nm处显示出强烈的电致发光,黄色发射,ZnStq_Cl:PVK和ZnStq_OCH3:PVK,分别。对于所有研究的薄膜,主要的光致发光发射带在565和571nm之间观察到。发现具有窄电致发光光谱的ZnStq_OCH3:PVK层的OLED具有足够的色纯度,可以产生功耗降低的超高分辨率显示器(半峰全宽为59nm,2244cd/m2的最大亮度和1.24cd/A的最大电流效率,导通电压为6.94V,阈值电压为7.35V)。为了表征活性层的光物理性质,ZnStq_R:PVK层样品另外沉积在玻璃和硅衬底上。我们发现,获得的结果预定了ZnStq_R:PVK层,用于未来的照明行业。
    For the first time, organic light-emitting diodes (OLEDs) based on bis(8-hydroxyquinoline) zinc with a styryl group (ZnStq) dispersed in poly(N-vinylcarbazole) matrix (ZnStq_R:PVK, where R = H, Cl, OCH3) were fabricated. The ZnStq_R:PVK films made via the spin-coating method were used as the active layer in these devices. The produced OLEDs showed strong electroluminescence with yellow emissions at 590, 587 and 578 nm for the ZnStq_H:PVK, ZnStq_Cl:PVK and ZnStq_OCH3:PVK, respectively. For all the studied thin films, the main photoluminescence emission bands were observed between 565 and 571 nm. The OLED with the ZnStq_OCH3:PVK layer with a narrow electroluminescence spectrum was found to have sufficient color purity to produce ultra-high-resolution displays with reduced power consumption (full width at half maximum of 59 nm, maximum brightness of 2244 cd/m2 and maximum current efficiency of 1.24 cd/A, with a turn-on voltage of 6.94 V and a threshold voltage of 7.35 V). To characterize the photophysical properties of the active layer, the ZnStq_R:PVK layers samples were additionally deposited on glass and silicon substrates. We found that the obtained results predestine ZnStq_R:PVK layers for use in the lighting industry in the future.
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  • 文章类型: Journal Article
    通过对某些三元有机混合物进行深入的光学研究,本文报道的椭偏分析具有新颖性。这项研究的重点是通过改变旋涂为薄膜的混合材料的重量比来调节和控制活性层的相对介电常数。为了调查这一点,在三元共混物(D:A1:A2)薄膜上进行了基于椭圆偏振光谱的广泛方法,涉及供体[D=氯化共轭聚合物(PBDB-T-2Cl)]和两种受体材料[A1=非富勒烯(ITIC-F)和A2=富勒烯(PCBM)]。折射率构成了一个关键参数,它通过预测光穿过设备时的轨迹来揭示光伏电池的可行性。在这个术语中,获得的更高的折射率支持更高的吸收系数。值得注意的是,介电常数可以通过第三元素的数量的适度变化来严格调整和精细校准,导致相当大的修改。此外,在共混物中包含富勒烯,作为第三个元素,导致平滑的地形轮廓,进一步细化膜的表面。从电气的角度来看,三元共混物的性能优于聚合物薄膜。成分的协同相互作用强调了它们增强太阳能转换装置的潜力。
    The ellipsometric analyses reported in this paper present a novelty by bringing an in-depth optical investigation of some ternary organic blends. This study focuses on the tunability and control of the relative permittivity of active layers by varying the weight ratio of blended materials spin-coated as thin films. To investigate this, an extensive approach based on spectroscopic ellipsometry was conducted on ternary blend (D:A1:A2) thin films, involving a donor [D = chlorinated conjugated polymer (PBDB-T-2Cl)] and two acceptor materials [A1 = a non-fullerene (ITIC-F) and A2 = a fullerene (PCBM)]. The refractive index constitutes a key parameter that exposes insights into the feasibility of photovoltaic cells by predicting the trajectory of light as it transits the device. In this term, higher obtained refractive indexes support higher absorption coefficients. Notably, the dielectric constant can be rigorously tuned and finely calibrated by modest variations in the quantity of the third element, resulting in considerable modifications. Moreover, the inclusion of fullerene in blends, as the third element, results in a smooth topographical profile, further refining the surface of the film. From an electrical point of view, the ternary blends outperform the polymer thin films. The synergistic interaction of constituents emphasizes their potential to enhance solar conversion devices.
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