振动传感器广泛应用于工业等诸多领域,农业,军事,医学,环境,等。然而,由于快速升级,大多数由刚性甚至有毒材料组成的传感器会对环境造成污染,并导致电子废物的数量增加。为了满足绿色电子的要求,提倡使用可生物降解材料来开发振动传感器。在这里,据报道,振动传感器是基于铅笔在纸上绘制石墨的策略。具体来说,在具有锯齿形框架和平行微槽的纸上进行重复的铅笔绘图过程,形成石墨涂层,因此用作用于机电信号转换的功能导电层。为了提高传感器对振动的灵敏度,在纸的中心加载了一个质量,因此,在振动激励下可能会发生更高的振荡幅度。这样做,基于纸张的传感器可以响应从5Hz到1kHz的宽频率范围的振动,和最大加速度为10g的振动。结果表明,该传感器不仅可以用于监测塑料板或物体掉落的转向节敲击声产生的振动,而且可以用于检测诸如屏蔽切割头之类的区域的振动,以评估机械的工作条件。基于纸的MEMS振动传感器具有易于制造的优点,低成本,环保,表明了其在振动监测领域的巨大应用潜力。
Vibration sensors are widely used in many fields like industry, agriculture, military, medicine, environment, etc. However, due to the speedy upgrading, most sensors composed of rigid or even toxic materials cause pollution to the environment and give rise to an increased amount of electronic waste. To meet the requirement of green electronics, biodegradable materials are advocated to be used to develop vibration sensors. Herein, a vibration sensor is reported based on a strategy of pencil-drawing graphite on paper. Specifically, a repeated pencil-drawing process is carried out on paper with a zigzag-shaped framework and parallel microgrooves, to form a graphite coating, thus serving as a functional conductive layer for electromechanical signal conversion. To enhance the sensor\'s sensitivity to vibration, a mass is loaded in the center of the paper, so that higher oscillation amplitude could happen under vibrational excitation. In so doing, the paper-based sensor can respond to vibrations with a wide frequency range from 5 Hz to 1 kHz, and vibrations with a maximum acceleration of 10 g. The results demonstrate that the sensor can not only be utilized for monitoring vibrations generated by the knuckle-knocking of plastic plates or objects falling down but also can be used to detect vibration in areas such as the shield cut head to assess the working conditions of machinery. The paper-based MEMS vibration sensor exhibits merits like easy fabrication, low cost, and being environmentally friendly, which indicates its great application potential in vibration monitoring fields.