This study aims to establish and optimize a process for the fabrication of 3D microstructures of the biocompatible polymer Parylene C using hot embossing techniques. The different process parameters such as embossing temperature, embossing force, demolding temperature and speed, and the usage of a release agent were optimized, utilizing adhesive micropillars as a use case. To enhance compatibility with conventional semiconductor fabrication techniques, hot embossing of Parylene C was adapted from conventional stainless steel substrates to silicon chip platforms. Furthermore, this adaptation included an investigation of the effects of the hot embossing process on metal layers embedded in the Parylene C, ensuring compatibility with the ultra-thin Parylene printed circuit board (PCB) demonstrated previously. To evaluate the produced microstructures, a combination of characterization methods was employed, including light microscopy (LM) and scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and Fourier-transform infrared spectroscopy (FTIR). These methods provided comprehensive insights into the morphological, chemical, and structural properties of the embossed Parylene C. Considering the improved results compared to existing patterning techniques for Parylene C like plasma etching or laser ablation, the developed hot embossing approach yields a superior structural integrity, characterized by increased feature resolution and enhanced sidewall smoothness. These advancements render the method particularly suitable for diverse applications, including but not limited to, sensor optical components, adhesive interfaces for medical wearables, and microfluidic systems.

Precise tooling is vital for defect-free production of micro injection moulded (μ-IM) or hot-embossed products. The demoulding stage of such moulding and forming processes poses a serious challenge to the integrity of thin miniature features because of friction, adhesion, and thermal stresses. Typically, micro moulds involve geometrically textured patterns or features such as linear ridges, pillars, channels, and holes, the characteristic dimensions of which range from 10 to 300 μm. Realistically complex mould designs, containing precision micro features (enhanced fillet radius and positive draft angle) and high surface quality, are presented in this work. Electropolishing based on forward pulse currents (PC) has been used to shape and polish Ni micro moulds that contain sets of micron-scaled linear ridges and star patterns in order to ease the separation of moulded polymeric parts from the metallic mould during ejection and demoulding. The use of forward pulsed currents improved the mould design by increasing the fillet radii and draft angle while keeping the surface roughness low and maintaining a good surface shine. An optimization study of forward PC using a green solution of nickel sulfamate varied EP times (0-70 min) and duty cycles (40, 50, 60, and 70%) at a process conditions of 2.8 V, 50 °C, and 250 rpm. The best topographical and morphological changes were observed for a typical microfluidic channel (w × h, 100 × 110 μm) with an EP time of 70 min and 50% duty cycle: fillet radius increased by 3.8 μm, draft angle by 3.3°, and the channel width reduced by 11.4% while surface roughness changed by 8.6% and surface shine improved by 48.9%. Experimental validation was performed using hot embossing wherein the electropolished Ni mould replicated the micro channels and star patterns in PMMA chips with notably fewer burrs, material pile up, and no feature distortion. Moreover, there was a reduction in the side wall roughness of micro channels in PDMS casting with electropolished Ni mould by 16%. Hence, this work presents a significant scientific contribution to improving the efficiency of micro mould tools and reduces the defects caused by friction and adhesion in replicated polymeric parts.

Given the growing importance of lab-on-a-chip in a number of fields, such as medical diagnosis or environmental analysis, the fact that the current fabrication process relies mainly on oil-based polymers raises an ecological concern. As an eco-responsible alternative, we presented, in this article, a manufacturing process for microfluidic devices from chitosan, a bio-sourced, biodegradable, and biocompatible polysaccharide. From chitosan powder, we produced thick and rigid films. To prevent their dissolution and reduce their swelling when in contact with aqueous solutions, we investigated a film neutralization step and characterized the mechanical and physical properties of the resulting films. On these neutralized chitosan films, we compared two micropatterning methods, i.e., hot embossing and mechanical micro-drilling, based on the resolution of microchannels from 100 µm to 1000 µm wide. Then, chitosan films with micro-drilled channels were bonded using a biocompatible dry photoresist on a glass slide or another neutralized chitosan film. Thanks to this protocol, the first functional chitosan microfluidic devices were prepared. While some steps of the fabrication process remain to be improved, these preliminary results pave the way toward a sustainable fabrication of lab-on-a-chip.

Electrohydrodynamic-jet printing (E-jet printing) is a direct-writing technology for manufacturing micro-nano devices. To further reduce the inner diameter of the nozzle to improve the printing resolution, a large-scale manufacturing method of SU-8 polymer micro/nanoscale nozzle by means of a process combining UV exposure and hot embossing was proposed. To improve the adhesive strength between the UV mask and SU-8, the influence of the oxygen plasma treatment parameters on the water contact angles of the UV mask was analyzed. The effect of hot embossing time and temperature on the replication precision was studied. The influence of UV exposure parameters and thermal bonding parameters on the micro and nanochannel pattern was investigated. The SU-8 polymer nozzles with 188 ± 3 nm wide and 104 ± 2 nm deep nanochannels were successfully fabricated, and the replication precision can reach to 98.5%. The proposed manufacturing method of SU-8 polymer nozzles in this study will significantly advance the research on the transport properties of nanoscale channels in E-jet nozzles and facilitate further advancements in E-jet based applications.

Polymethyl methacrylate (PMMA) is a material with good surface wettability and has unique and widespread applications in industrial fields. However, fabricating this material in an environmentally friendly way while maintaining its mechanical robustness remains a challenging task. One effective way is through the rational design of microstructure surfaces. The current study fabricated a pyramid microstructure array on a mold surface using offset-tool-servo flycutting, which was then combined with hot embossing to replicate an inverted pyramid microstructure array on a PMMA surface. Firstly, a toolpath compensation algorithm was developed to linearize the arc toolpath and reduce the cost of ultra-precision lathe. Then, the algorithm was further developed to achieve automatic linear toolpath intersection, aiming to ensure the machining accuracy and improve machining efficiency. An experiment testing the linear toolpath intersecting at 90° was conducted, fabricating a pyramid microstructure array with nanoscale roughness on the mold surface. This surface was then employed for replicating an inverted pyramid microstructure array on the PMMA surface using hot embossing. Furthermore, the accuracy of replication was evaluated, and the experimental results demonstrated excellent replication fidelity, exceeding 98%. The microstructural surface of the PMMA exhibited a change in surface wettability. The wettability test showed a water-droplet contact angle reduction from 84.8° ± 0.1° to 56.2° ± 0.1°, demonstrating a good hydrophilic effect. This study introduces a novel, environmentally friendly and high-precision method to fabricate a functional PMMA surface with an inverted pyramid microstructure array. The results of this study also provide strong technical support and theoretical guidance for micro-nanostructure functional surface machining and replicating.

Microfluidics evolved with the appearance of polydimethylsiloxane (PDMS), an elastomer with a short processing time and the possibility for replication on a micrometric scale. Despite the many advantages of PDMS, there are well-known drawbacks, such as the hydrophobic surface, the absorption of small molecules, the low stiffness, relatively high cost, and the difficulty of scaling up the fabrication process for industrial production, creating a need for alternative materials. One option is the use of stiffer thermoplastics, such as the cyclic olefin copolymer (COC), which can be mass produced, have lower cost and possess excellent properties. In this work, a method to fabricate COC microfluidic structures was developed. The work was divided into process optimization and evaluation of material properties for application in microfluidics. In the processing step, moulding, sealing, and liquid handling aspects were developed and optimized. The resulting COC devices were evaluated from the point of view of molecular diffusion, burst pressure, temperature resistance, and susceptibility to surface treatments and these results were compared to PDMS devices. Lastly, a target DNA hybridization assay was performed showing the potential of the COC-based microfluidic device to be used in biosensing and Lab-on-a-Chip applications.

The fabrication of high-performance microscale devices in substrates with optimal material properties while keeping costs low and maintaining the flexibility to rapidly prototype new designs remains an ongoing challenge in the microfluidics field. To this end, we have fabricated a micro free-flow electrophoresis (µFFE) device in cyclic olefin copolymer (COC) via hot embossing using a PolyJet 3D-printed master mold. A room-temperature cyclohexane vapor bath was used to clarify the device and facilitate solvent-assisted thermal bonding to fully enclose the channels. Device profiling showed 55 µm deep channels with no detectable feature degradation due to solvent exposure. Baseline separation of fluorescein, rhodamine 110, and rhodamine 123, was achieved at 150 V. Limits of detection for these fluorophores were 2 nM, 1 nM, and 10 nM, respectively, and were comparable to previously reported values for glass and 3D-printed devices. Using PolyJet 3D printing in conjunction with hot embossing, the full design cycle, from initial design to production of fully functional COC µFFE devices, could be completed in as little as 6 days without the need for specialized clean room facilities. Replicate COC µFFE devices could be produced from an existing embossing mold in as little as two hours.

As a technology for polymer surface fabrication, roll-to-roll hot embossing has been widely used because of its advantages, such as its low cost and high efficiency. However, the metal micro-mold is a major factor that determines the hot embossing of the polymer. In this study, a new metal micro-mold manufacturing method is proposed. The metal micro-mold is produced using laser shock imprinting (LSI) on the surface of metal foil. It has the characteristics of good thermal stability and high strength. During our LSI experiment, the strength of the mold increased after laser shocking. In this study, copper foils of different thicknesses were selected for LSI experiments. Through the analysis of the profile and forming depth of the microstructure, combined with the numerical simulation of the forming mechanism of copper foils with different thicknesses using ABAQUS software(Abaqus 2021), a copper foil with a flat back was selected as the final metal micro-mold. On this basis, copper molds with different microstructure shapes were created. Then, the mold was used in the hot-embossing experiment to manufacture the microstructure on the surface of polyethylene terephthalate (PET) and to study the fidelity and integrity of the molded microstructure. The deformation resistance of the copper mold under hot-embossing conditions was verified through a nano-indentation experiment. The final results show that the metal micro-mold produced via LSI had a high accuracy and molding stability and has potential applications in the field of roll-to-roll hot embossing.

Structural ceramics are potential mold materials for hot embossing, due to their superior mechanical strength as well as low thermal expansion coefficient. However, the service time of molds, especially those in high-temperature hot embossing, strongly depends on their oxidation resistance. As a result, the oxidation behaviors of various ceramics (e.g., SiC, ZrO2, AlN, Al2O3, Si3N4 and WC) were investigated by conducting cyclic oxidation experiments in this study. Mass changes of ceramic samples thermal treated under different temperatures were measured by thermogravimeter (TGA) and precision electronic balance. The structural and chemical compositions of ceramic samples were detected by X-ray diffraction (XRD) and energy-dispersive X-ray spectroscopy (EDXS). The surface morphology of the samples was characterized by scanning electron microscopy (SEM), and the surface roughness of the samples was measured by white light interferometry. The mechanical properties of the samples were evaluated by a microhardness tester and nanoindentation instrument. It is noted that Al2O3 shows negligible oxidation within 1000 °C. ZrO2 maintains a decent surface roughness of below 32 nm and a stable hardness within 1000 °C. SiC has the highest hardness at high temperatures, and its surface roughness increases notably above 800 °C. The surface roughness of Si3N4 and AlN soars between 600 °C and 800 °C. The surface finish of WC is significantly deteriorated above 600 °C. Therefore, the appropriate embossing temperature of Al2O3 ceramics is below 1000 °C, that of ZrO2 ceramics is between 800 °C and 1000 °C, that of SiC ceramics is below 800 °C, that of Si3N4 and AlN ceramics is between 600 °C and 800 °C, and that of WC ceramics below 600 °C.

Superhydrophobic surfaces, which self-clean through rinsing with water, have gained significant importance during the last decades. A method to fabricate such a surface featuring the lotus effect, solely through structuring, is hot pulling of a polymer surface. This technique provides the so-called nanofur, which consists of a polymer surface densely covered with a polymeric fur of extremely thin hair-like structures. Here, we present a continuous roll-to-roll process for the fabrication of a thin polymeric film covered with nanofur from polypropylene. Our process enables structuring of large areas of the order of square meters using industry standard machinery. This opens up many possible applications for nanofur that could previously not be realized because of the limitations of conventional hot embossing regarding structurable area. The structured film is subsequently processed into an exemplary product, that is, so-called nanopads; polymeric sandwiches of polypropylene film covered with nanofur and filled with an oil-absorbing material. These are well-suited for the cleanup of small oil spills.