AlGaN

AlGaN
  • 文章类型: Journal Article
    在这里,我们使用离轴电子全息技术与先进的透射电子显微镜技术相结合,以了解AlGaN隧道结LED器件的光电特性。已经通过金属有机化学气相沉积生长了四个在290nm处发光的相同的AlGaNLED器件。然后,通过分子束外延将具有和不具有InGaN或GaN夹层的Ge掺杂的n型区生长到顶部Mg掺杂的p型层上,以形成隧道结,并因此形成高质量的欧姆金属接触。然后,使用离轴电子全息技术来证明当使用InGaN夹层时,隧道结的宽度从9.5nm减小到4.1nm。因此,我们证明了离轴电子全息技术可用于可重复地测量高度缺陷且具有挑战性的材料(例如AlGaN)中静电势的纳米尺度变化,并且可以对器件进行系统研究。然后使用标准光电技术来表征LED器件,并且LED性能的改进与电子全息结果相关。
    Here we use off-axis electron holography combined with advanced transmission electron microscopy techniques to understand the opto-electronic properties of AlGaN tunnel junction (TJ)-light-emitting diode (LED) devices for ultraviolet emission. Four identical AlGaN LED devices emitting at 290 nm have been grown by metal-organic chemical vapour deposition. Then Ge doped n-type regions with and without InGaN or GaN interlayers (IL) have been grown by molecular beam epitaxy onto the top Mg doped p-type layer to form a TJ and hence a high quality ohmic metal contact. Off-axis electron holography has then been used to demonstrate a reduction in the width of the TJ from 9.5 to 4.1 nm when an InGaN IL is used. As such we demonstrate that off-axis electron holography can be used to reproducibly measure nm-scale changes in electrostatic potential in highly defected and challenging materials such as AlGaN and that systematic studies of devices can be performed. The LED devices are then characterized using standard opto-electric techniques and the improvements in the performance of the LEDs are correlated with the electron holography results.
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  • 文章类型: Journal Article
    UV-C光谱范围内的发光二极管(UV-CLED)可能会在包括灭菌和水净化在内的广泛应用中替代笨重且有毒的汞灯。若干障碍仍然限制UV-CLED的效率。倒装芯片几何形状的器件在p-AlGaN和高反射Al反射镜之间的功函数存在巨大差异,而UV-C透明电流扩散层的缺乏限制了UV-CLED在标准几何形状中的发展。这里证明了通过等离子体增强化学气相沉积方法直接在p-AlGaN顶层上实现的无转移石墨烯在这两种情况下都可以实现高效的275nmUV-CLED,倒装芯片和标准几何形状。在倒装芯片几何中,石墨烯充当Al反射镜和p-AlGaN之间的接触中间层,在8V时可实现9.5%的外部量子效率(EQE)和5.5%的壁插效率(WPE)。石墨烯与〜1nmNiOx支撑层结合允许导通电压<5V。在标准几何形状中,石墨烯充当长度为1mm的电流扩展层。这些顶部发光器件在8.7V下表现出2.1%的EQE和1.1%的WPE。本文受版权保护。保留所有权利。
    Light-emitting diodes in the UV-C spectral range (UV-C LEDs) can potentially replace bulky and toxic mercury lamps in a wide range of applications including sterilization and water purification. Several obstacles still limit the efficiencies of UV-C LEDs. Devices in flip-chip geometry suffer from a huge difference in the work functions between the p-AlGaN and high-reflective Al mirrors, whereas the absence of UV-C transparent current spreading layers limits the development of UV-C LEDs in standard geometry. Here it is demonstrated that transfer-free graphene implemented directly onto the p-AlGaN top layer by a plasma enhanced chemical vapor deposition approach enables highly efficient 275 nm UV-C LEDs in both, flip-chip and standard geometry. In flip-chip geometry, the graphene acts as a contact interlayer between the Al-mirror and the p-AlGaN enabling an external quantum efficiency (EQE) of 9.5% and a wall-plug efficiency (WPE) of 5.5% at 8 V. Graphene combined with a ≈1 nm NiOx support layer allows a turn-on voltage <5 V. In standard geometry graphene acts as a current spreading layer on a length scale up to 1 mm. These top-emitting devices exhibit a EQE of 2.1% at 8.7 V and a WPE of 1.1%.
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  • 文章类型: Journal Article
    在我们追求高功率太赫兹(THz)波产生的过程中,我们提出了基于AlxGa1-xN/GaN/AlxGa1-xN材料系统的创新边缘终止单漂移区(SDR)多量子阱(MQW)冲击雪崩渡越时间(IMPATT)结构,固定铝摩尔分数x=0.3。两种不同的MQW二极管配置,即基于p+n结和肖特基势垒二极管结构,对其THz潜力进行了调查。为了增强反向击穿特性,我们建议采用台面蚀刻和氮离子注入进行边缘终止,缓解与过早和软故障有关的问题。使用自洽量子漂移扩散(SCQDD)模型,通过稳态和高频表征来全面评估THz性能。我们提出的Al0.3Ga0.7N/GaN/Al0.3Ga0.7NMQW二极管,以及基于GaN的单漂移区(SDR)和基于3C-SiC/Si/3C-SiCMQW的双漂移区(DDR)IMPATT二极管,是模拟的。提出的二极管中的肖特基势垒显着降低了器件串联电阻,在1.0THz时,将峰值连续波功率输出提高到约300mW,将DC到THz的转换效率提高到近13%。噪声性能分析表明,雪崩区内的MQW结构可以减轻噪声并提高整体性能。针对最先进的THz源进行基准测试,确立了我们提出的THz源的优越性,强调其在推进太赫兹技术及其应用方面的潜力。
    In our pursuit of high-power terahertz (THz) wave generation, we propose innovative edge-terminated single-drift region (SDR) multi-quantum well (MQW) impact avalanche transit time (IMPATT) structures based on the AlxGa1-xN/GaN/AlxGa1-xN material system, with a fixed aluminum mole fraction of x = 0.3. Two distinct MQW diode configurations, namely p+-n junction-based and Schottky barrier diode structures, were investigated for their THz potential. To enhance reverse breakdown characteristics, we propose employing mesa etching and nitrogen ion implantation for edge termination, mitigating issues related to premature and soft breakdown. The THz performance is comprehensively evaluated through steady-state and high-frequency characterizations using a self-consistent quantum drift-diffusion (SCQDD) model. Our proposed Al0.3Ga0.7N/GaN/Al0.3Ga0.7N MQW diodes, as well as GaN-based single-drift region (SDR) and 3C-SiC/Si/3C-SiC MQW-based double-drift region (DDR) IMPATT diodes, are simulated. The Schottky barrier in the proposed diodes significantly reduces device series resistance, enhancing peak continuous wave power output to approximately 300 mW and DC to THz conversion efficiency to nearly 13% at 1.0 THz. Noise performance analysis reveals that MQW structures within the avalanche zone mitigate noise and improve overall performance. Benchmarking against state-of-the-art THz sources establishes the superiority of our proposed THz sources, highlighting their potential for advancing THz technology and its applications.
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  • 文章类型: Journal Article
    我们研究了在230-300nm光谱范围内显示出高内部量子效率(约50%)的AlGaN/AlNQD超晶格中双峰发射的起源。较长波长的二次发射与具有变形QD层的锥形畴的存在有关,它起源于第一个AlN缓冲区/超晶格界面并垂直传播。锥体起源于AlN中30°刻面的浅坑,这似乎与产生强烈剪切应变的螺纹位错有关。锥状结构在边界小平面处呈现Ga富集,并在圆锥域内呈现较大的QD。发光的双峰性归因于锥体内和多面边界处不同的点尺寸和组成,显微镜结果和薛定谔-泊松计算的相关性证实了这一点。
    We study the origin of bimodal emission in AlGaN/AlN QD superlattices displaying a high internal quantum efficiency (around 50%) in the 230-300 nm spectral range. The secondary emission at longer wavelengths is linked to the presence of cone-like domains with deformed QD layers, which originate at the first AlN buffer/superlattice interface and propagate vertically. The cones originate at a 30°-faceted shallow pit in the AlN, which appears to be associated with a threading dislocation that produces strong shear strain. The cone-like structures present Ga enrichment at the boundaring facets and larger QDs within the conic domain. The bimodality of the luminescence is attributed to the differing dot size and composition within the cones and at the faceted boundaries, which is confirmed by the correlation of microscopy results and Schrödinger-Poisson calculations.
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  • 文章类型: Journal Article
    载流子的注入和泄漏对GaN基激光器的光电性能有显著影响。为了改善激光对载流子的限制,提出了一种用于近紫外(NUV)GaN基激光器的斜坡形空穴阻挡层(HBL)和电子阻挡层(EBL)结构。我们使用CrosslightLASTIP对HBL和EBL的能带进行了模拟和理论分析。我们的模拟表明,斜坡形HBL和EBL结构的能带被调制,可以有效抑制载体泄漏,提高载流子注入效率,提高量子阱中受激辐射复合率,降低阈值电流,改善光场分布,and,最终,提高激光输出功率。因此,采用斜形HBL和EBL结构可以实现激光器优越的电学和光学性能。
    The injection and leakage of charge carriers have a significant impact on the optoelectronic performance of GaN-based lasers. In order to improve the limitation of the laser on charge carriers, a slope-shape hole-barrier layer (HBL) and electron-barrier layer (EBL) structure are proposed for near-UV (NUV) GaN-based lasers. We used Crosslight LASTIP for the simulation and theoretical analysis of the energy bands of HBL and EBL. Our simulations suggest that the energy bands of slope-shape HBL and EBL structures are modulated, which could effectively suppress carrier leakage, improve carrier injection efficiency, increase stimulated radiation recombination rate in quantum wells, reduce the threshold current, improve optical field distribution, and, ultimately, improve laser output power. Therefore, using slope-shape HBL and EBL structures can achieve the superior electrical and optical performance of lasers.
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  • 文章类型: Journal Article
    AlGaN基发光二极管在深紫外领域的许多应用前景广阔,特别是净水工程,空气灭菌,荧光传感,等。然而,为了实现这些潜力,了解影响器件光学和电学性能的因素至关重要。在这项工作中,通过金属有机化学气相沉积(MOCVD)在具有GaN模板的c面图案化蓝宝石衬底上生长AlxGa1-xN(x=0.24,0.34,0.47)外延层。结果表明,铝含量的增加导致AlGaN外延层的表面形态和晶体质量的恶化。从ω扫描摇摆曲线的对称和不对称平面确定AlxGa1-xN外延层的位错密度,最小值为1.01×109cm-2。采用(101'5)平面倒数空间映射来测量在GaN上生长的AlxGa1-xN层的面内应变。来自XPS的AlxGa1-xN样品的表面势垒高度为1.57、1.65和1.75eV,分别。通过PL光谱获得的带隙结果与XRD的结果很好地一致。通过制备简单的铟球电极,成功地测定了样品的霍尔迁移率和片电子浓度。
    AlGaN-based LEDs are promising for many applications in deep ultraviolet fields, especially for water-purification projects, air sterilization, fluorescence sensing, etc. However, in order to realize these potentials, it is critical to understand the factors that influence the optical and electrical properties of the device. In this work, AlxGa1-xN (x = 0.24, 0.34, 0.47) epilayers grown on c-plane patterned sapphire substrate with GaN template by the metal organic chemical vapor deposition (MOCVD). It is demonstrated that the increase of the aluminum content leads to the deterioration of the surface morphology and crystal quality of the AlGaN epitaxial layer. The dislocation densities of AlxGa1-xN epilayers were determined from symmetric and asymmetric planes of the ω-scan rocking curve and the minimum value is 1.01 × 109 cm-2. The (101¯5) plane reciprocal space mapping was employed to measure the in-plane strain of the AlxGa1-xN layers grown on GaN. The surface barrier heights of the AlxGa1-xN samples derived from XPS are 1.57, 1.65, and 1.75 eV, respectively. The results of the bandgap obtained by PL spectroscopy are in good accordance with those of XRD. The Hall mobility and sheet electron concentration of the samples are successfully determined by preparing simple indium sphere electrodes.
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  • 文章类型: Journal Article
    研究了纳米压痕技术在GaN基LD中引起的位错滑移系统和运动行为。在{112'2}<112'3>上引入了汉堡矢量为b=1/3<112'3>的位错,或{11'01}<112'3>上部p-GaN层中的金字塔滑移系统。此外,{0001}<112'0>基底滑移系统也被激活。器件中的AlGaN/InGaN多层可以提供失配应力以防止位错滑过。观察到,由压头引起的位错密度从多层的上部区域到下部区域显着降低。金字塔滑移面上的ac位错大部分被应变层阻挡。
    The slip systems and motion behavior of dislocations induced by nano-indentation technique in GaN-based LDs were investigated. Dislocations with burgers vector of b = 1/3 <11 2 ¯ 3> were introduced on either {11 2 ¯ 2} <11 2 ¯ 3>, or {1 1 ¯ 01} <11 2 ¯ 3> pyramidal slip systems in the upper p-GaN layer. Besides, {0001} <11 2 ¯ 0> basal slip system was also activated. The AlGaN/InGaN multi-layers in device can provide mismatch stresses to prevent dislocations from slipping through. It was observed that the density of dislocations induced by the indenter significantly decreased from the upper to the lower regions of the multi-layers. The a + c dislocations on pyramidal slip planes were mostly blocked by the strained layers.
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  • 文章类型: Journal Article
    尽管AlGaN基紫外-B发光二极管(UV-BLED)在光疗等各种应用中具有相当大的潜力,UV固化,植物生长,和分析技术,由于发光效率低,它们的发展仍在进行中。在这项研究中,我们引入了一种新颖的外延生长机制,以有效地控制AlGaN多阱(MWs)上AlGaN纳米棒结构的高度和厚度使用水平反应器基金属有机化学气相沉积(MOCVD)。通过调节H2载气流量,我们可以控制生长边界层的厚度,成功地将AlGaN阱和p-AlGaN层与衬底分离。阴极发光(CL)测量证实了核-壳AlGaN量子阱作为高度稳定的非极化结构的稳定性,在各种注入电流下,波长峰值几乎保持不变。此外,透射电子显微镜(TEM)提供了明确的分化证据,突出了275nmAlGaN核和295nmAlGaN壳结构的不同形成。开发的AlGaNMW结构,以这些矫正特征为特征,与传统的核-壳AlGaN结构相比,不仅显示出显着改善的电致发光(EL)峰强度,而且还显示出低得多的泄漏电流。新提出的生长机制和先进的非极化核-壳AlGaN结构有望成为显著提高下一代高效UVLED效率的优秀替代品。
    Despite the considerable potential of AlGaN-based ultraviolet-B light-emitting diodes (UV-B LEDs) in various applications such as phototherapy, UV curing, plant growth, and analytical technology, their development is still ongoing due to low luminescence efficiency. In this study, we introduced a novel epitaxial growth mechanism to effectively control the height and thickness of AlGaN multiple wells (MWs) on AlGaN nanorod structures using horizontal reactor-based metal-organic chemical vapor deposition (MOCVD). By adjusting the H2 carrier gas flow rate, we could control the growth boundary layer\'s thickness, successfully separating the AlGaN well and p-AlGaN layer from the substrate. Cathodoluminescence (CL) measurements confirmed the stability of the core-shell AlGaN quantum wells as a highly stable nonpolarized structure, with the wavelength peak remaining almost unchanged under various injection currents. Furthermore, transmission electron microscopy (TEM) provided clear evidence of differentiation, highlighting the distinct formation of the 275 nm AlGaN core and the 295 nm AlGaN shell structure. The developed AlGaN MW structure, characterized by these rectification features, not only demonstrated a significantly improved electroluminescence (EL) peak intensity but also exhibited a much lower leakage current compared to the conventional core-shell AlGaN structure. The newly proposed growth mechanism and advanced nonpolarized core-shell AlGaN structure are expected to serve as excellent alternatives for substantially enhancing the efficiency of the next generation of high-efficiency UV LEDs.
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  • 文章类型: Journal Article
    最近已经证明了Aln/12Ga1-n/12N(n=2-10:整数)具有朝向c[0001]方向的1-2单层(ML)面内构型的亚稳定性。为了从理论上解释这些亚稳态结构的存在,需要相对较大的计算单元。然而,以前的计算仅限于使用小的计算单元大小来估计有序的Al1/2Ga1/2N模型的局部潜在深度(Δσ)。在这项工作中,我们能够根据AlGaN合金中邻近的Al原子(δEAl-Al)之间的相互作用能评估大型计算单元。要做到这一点,通过使用(5a1×5a2×5c)单元的第一原理计算(FPC)估算δEAl-Al值。接下来,使用估计的δEAl-Al值和Monte-Carlo方法,使用各种大型计算单元模型对可能的有序配置进行了调查。然后,FPC估算了各种Δσ值,并将其与其他研究小组先前报告的配置进行了比较。我们发现,从(4a1×2a2×1c)计算单元(C42)获得的有序构型具有-9.3meV/阳离子的最低Δσ,并且在c(0001)平面上表现出具有(-Al-Al-Ga-)和(-Al-Ga-)序列排列的面内构型沿m{1-100}平面观察到。此外,C42可以通过具有8个阳离子的矩形原始单元来建模。因此,根据我们的数值计算,我们发现了从实验中获得的形态与原始细胞形状之间的一致性。 .
    Metastability of Aln/12Ga1-n/12N (n= 2-10: integer) with the 1-2 monolayer (ML) in-plane configuration towards thec[0001] direction has been demonstrated recently. To theoretically explain the existence of these metastable structures, relatively large calculation cells are needed. However, previous calculations were limited to the use of small calculation cell sizes to estimate the local potential depth (Δσ) of ordered Al1/2Ga1/2N models. In this work, we were able to evaluate large calculation cells based on the interaction energies between proximate Al atoms (δEAl-Al) in AlGaN alloys. To do this,δEAl-Alvalues were estimated by first-principles calculations (FPCs) using a (5a1× 5a2× 5c) cell. Next, a survey of the possible ordered configurations using various large calculation cell models was performed using the estimatedδEAl-Alvalues and the Monte-Carlo method. Then, various Δσvalues were estimated by FPCs and compared with the configurations previously reported by other research groups. We found that the ordered configuration obtained from the (4a1× 2a2× 1c) calculation cell (C42) has the lowest Δσof -9.3 meV/cation and exhibited an in-plane configuration at thec(0001) plane having (-Al-Al-Ga-Ga-) and (-Al-Ga-) sequence arrangements observed along them11-00planes. Hence, we found consistencies between the morphology obtained from experiment and the shape of the primitive cell based on our numerical calculations.
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  • 文章类型: Journal Article
    在本文中,为了解决AlGaN紫外发光二极管中的电子泄漏问题,我们已经提出了一种电子阻挡自由层AlGaN紫外(UV)发光二极管(LED),使用极化工程的心形AlGaN量子势垒(QB)代替传统的势垒。这种新颖的结构减少了在连续量子势垒之间的互连处的向下的带弯曲,并且还使静电场变平。在模拟期间使用的参数是从常规UVLED的参考实验数据中提取的。使用SilvacoAtlasTCAD工具;版本8.18.1。R,我们比较和优化了三种不同结构的LED的光学和电学特性。275nm电致发光增强(52.7%),光输出功率(50.4%),对于在屏障中具有心形Al成分的无EBLAlGaNUVLED,记录了效率(61.3%)。这些改进归因于表面上最小化的非辐射复合,由于有效导带势垒高度逐渐增加,这随后增强了载流子限制。因此,所提出的无EBLAlGaNLED是增强光功率和产生高效UV发射器的潜在解决方案。
    In this paper, in order to address the problem of electron leakage in AlGaN ultra-violet light-emitting diodes, we have proposed an electron-blocking free layer AlGaN ultra-violet (UV) light-emitting diode (LED) using polarization-engineered heart-shaped AlGaN quantum barriers (QB) instead of conventional barriers. This novel structure has decreased the downward band bending at the interconnection between the consecutive quantum barriers and also flattened the electrostatic field. The parameters used during simulation are extracted from the referred experimental data of conventional UV LED. Using the Silvaco Atlas TCAD tool; version 8.18.1.R, we have compared and optimized the optical as well as electrical characteristics of three varying LED structures. Enhancements in electroluminescence at 275 nm (52.7%), optical output power (50.4%), and efficiency (61.3%) are recorded for an EBL-free AlGaN UV LED with heart-shaped Al composition in the barriers. These improvements are attributed to the minimized non-radiative recombination on the surfaces, due to the progressively increasing effective conduction band barrier height, which subsequently enhances the carrier confinement. Hence, the proposed EBL-free AlGaN LED is the potential solution to enhance optical power and produce highly efficient UV emitters.
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