纳米级定位在学术界和工业界都有许多应用。越来越多的应用需要具有长工作距离和纳米级分辨率的设备。摩擦惯性压电定位器,基于粘滑机制,实现纳米分辨率和厘米尺度的旅行。然而,复杂的预加载机制的要求,精密加工,和精确的组装增加了传统的摩擦惯性纳米定位器的成本。本文介绍了开源XYZ轴纳米定位系统的设计。利用基于磁铁的粘滑驱动机构,拟议的XYZ纳米定位器提供了几个优点,包括亚纳米分辨率,最大12公斤(水平)的有效载荷能力,紧凑的尺寸,低成本,易于组装;此外,该系统是无需调整的。性能测试验证了系统在扫描和步进操作模式下的精度。此外,共振谱肯定了机构的刚度和动力响应。此外,我们展示了这种纳米定位器在各种测量技术中的实际应用,包括扫描电子显微镜,测振法,和原子力显微镜。此外,我们介绍了与超高真空系统和其他现有系统兼容的纳米定位器设计的11种变体,3D打印,或黑客商业线性幻灯片。
Nanoscale positioning has numerous applications in both academia and industry. A growing number of applications require devices with long working distances and nanoscale resolutions. Friction-inertia piezoelectric positioners, which are based on the stick-slip mechanism, achieve both nanometer resolution and centimeter-scale travel. However, the requirements of complex preload mechanism, precision machining, and precise assembly increase the cost of conventional friction-inertia nanopositioners. Herein we present the design of an open-source XYZ-axis nanopositioning system. Utilizing a magnet-based stick-slip driving mechanism, the proposed XYZ nanopositioner provides several advantages, including sub-nanometer resolution, a payload capacity of up to 12 kg (horizontal), compact size, low cost, and easy assembly; furthermore, the system is adjustment-free. The performance tests validate the precision of the system in both scanning and stepping operation modes. Moreover, the resonant spectra affirm the rigidity and dynamic response of the mechanism. In addition, we demonstrate the practical applications of this nanopositioner in various measurement techniques, including scanning electron microscopy, vibrometry, and atomic force microscopy. Furthermore, we present 11 variations of the nanopositioner designs that are either compatible with ultra-high-vacuum systems and other existing systems, 3D printable, or hacking commercial linear slides.