生物传感器在不同的应用中发挥重要作用,如医疗诊断,环境监测,食品安全,以及生物分子相互作用的研究。高度敏感,无标签和一次性生物传感器对于许多临床应用是特别期望的。在过去的十年里,薄膜体声波谐振器(FBAR)已被开发为生物传感器,因为它们的谐振频率高,基础质量小(因此灵敏度更高)。更低的成本,无标签的能力和小尺寸。本文综述了用于FBAR的压电材料,设备结构的优化,以及它们作为生物传感器在广泛的生物应用中的应用,例如抗原的检测,DNA和小生物分子。还讨论了它们与微流体设备和高通量检测的集成。
Biosensors play important roles in different applications such as medical diagnostics, environmental monitoring, food safety, and the study of biomolecular interactions. Highly sensitive, label-free and disposable biosensors are particularly desired for many clinical applications. In the past decade, film bulk acoustic resonators (FBARs) have been developed as biosensors because of their high resonant frequency and small base mass (hence greater sensitivity), lower cost, label-free capability and small size. This paper reviews the piezoelectric materials used for FBARs, the optimisation of device structures, and their applications as biosensors in a wide range of biological applications such as the detection of antigens, DNAs and small biomolecules. Their integration with microfluidic devices and high-throughput detection are also discussed.