本文提出了一种具有标量矢量集成设计的独立MEMS矢量水听器。与传统的MEMS矢量水听器相比,这种设计解决了定向过程中左舷和右舷的模糊性问题,并且还实现了声信号的自包含存储。首先,介绍了自给式MEMS水听器的传感器原理和结构设计,然后给出了组合波束形成算法的原理。除此之外,提出了基于自含式MEMS矢量水听器的幅度和相位校准方法。然后,传感器的灵敏度和相位校准在驻波管中进行。矢量通道的灵敏度为-182.7dB(0dB@1V/μPa),标量通道的灵敏度为-181.8dB(0dB@1V/μPa)。最后,进行了室外水实验。实验结果表明,该自成一体的MEMS矢量水听器能够准确地拾取和记录水声信息。通过结合波束形成算法实现对目标的精确定位。在信噪比为13.67dB的室外实验条件下,到达方向(DOA)误差在5°以内。
A self-contained MEMS vector hydrophone with a scalar-vector integrated design is proposed in this paper. Compared with traditional MEMS vector hydrophones, this design solves the problem of ambiguity in the port and starboard during orientation, and also realizes the self-contained storage of acoustic signals. First, the sensor principle and structural design of the self-contained MEMS hydrophone are introduced, and then the principle of the combined beamforming algorithm is given. In addition to this, the amplitude and phase calibration method based on the self-contained MEMS vector hydrophone is proposed. Then, the sensitivity and phase calibrations of the sensor are carried out in the standing wave tube. The sensitivity of the vector channel is -182.7 dB (0 dB@1 V/μPa) and the sensitivity of the scalar channel is -181.8 dB (0 dB@1 V/μPa). Finally, an outdoor water experiment was carried out. The experimental results show that the self-contained MEMS vector hydrophone can accurately pick up and record underwater acoustics information. It realizes the precise orientation of the target by combining beamforming algorithms. The direction of arrival (DOA) error is within 5° under the outdoor experimental conditions with an SNR of 13.67 dB.