With the rapid development of mobile communication technology, the POI (piezoelectric on insulator) structure has gained recognition in the field of RF filtering. However, transverse modes remain in the passband of corresponding surface acoustic wave (SAW) devices, which impedes their application in crowded spectra. This article introduces a groove configuration to suppress transverse modes for POI SAW resonators employing a 50°YX-LiTaO3/SiO2/Si multilayered structure. First, the response of conventional POI SAW resonators was calculated by the 3D periodic FEM method, and the results indicate that transverse modes caused by energy leakage to busbar regions are serious in POI SAW resonators. Then, the groove configuration was adopted to confine energy within the aperture region by reducing the velocity at the end of IDT electrodes, and the groove dimension was optimized to achieve a nearly spurious-free response in the passband. Finally, experimental results of fabricated one-port SAW resonators with optimal groove configuration were provided to validate the suppression of transverse modes and the enhancement of the Q factor in the POI SAW resonator.

The optimization of nanoscale optical devices and structures will enable the exquisite control of planar optical fields. Polariton manipulation is the primary strategy in play. In two-dimensional heterostructures, the ability to excite mixed optical modes offers an additional control in device design. Phonon polaritons in hexagonal boron nitride have been a common system explored for the control of near-infrared radiation. Their hybridization with graphene plasmons makes these mixed phonon polariton modes in hexagonal boron nitride more appealing in terms of enabling active control of electrodynamic properties with a reduction of propagation losses. Optical resonators can be added to confine these hybridized plasmon-phonon polaritons deeply into the subwavelength regime, with these structures featuring high quality factors. Here, we show a scalable approach for the design and fabrication of heterostructure nanodisc resonators patterned in chemical vapor deposition-grown monolayer graphene and h-BN sheets. Real-space mid-infrared nanoimaging reveals the nature of hybridized polaritons in the heterostructures. We simulate and experimentally demonstrate localized hybridized polariton modes in heterostructure nanodisc resonators and demonstrate that those nanodiscs can collectively couple to the waveguide. High quality factors for the nanodiscs are measured with nanoscale Fourier transform infrared spectroscopy. Our results offer practical strategies to realize scalable nanophotonic devices utilizing low-loss hybridized polaritons for applications such as on-chip optical components.

In this paper, the theory, micromachining technology, and experimental results of the coupling of integrated magnetic film-based resonators for microwave signal filtering are presented. This is an extended contribution to the field of magnetostatic wave coupled resonators, including details about the technological results, circuit theory, and perspective applications for tunable integrated coupled magnetic resonators. An analytical approach using the magnetostatic wave approximation is used to derive the coupling coefficient between adjacent resonators coupled by the electromagnetic field decaying outside the resonators. Then, micromachining employing hot phosphoric acid etching is presented to manufacture integrated coupled resonators. Finally, circuit modeling and experimental results obtained using the ferromagnetic resonance technique are discussed.

This work presents a MEMS resonator used as an ultra-high resolution water vapor sensor (humidity sensing) to detect human activity through finger movement as a demonstrator example. This microelectromechanical resonator is designed as a clamped-clamped beam fabricated using the top metal layer of a commercial CMOS technology (0.35 μm CMOS-AMS) and monolithically integrated with conditioning and readout circuitry. Sensing is performed through the resonance frequency change due to the addition of water onto the clamped-clamped beam coming from the moisture created by the evaporation of water in the human body. The sensitivity and high-speed response to the addition of water onto the metal bridge, as well as the quick dewetting of the surface, make it suitable for low-power human activity sensing.

Flexible stress sensor arrays, comprising multiple flexible stress sensor units, enable accurate quantification and analysis of spatial stress distribution. Nevertheless, the current implementation of flexible stress sensor arrays faces the challenge of excessive signal wires, resulting in reduced deformability, stability, reliability, and increased costs. The primary obstacle lies in the electric amplitude modulation nature of the sensor unit\'s signal (e.g., resistance and capacitance), allowing only one signal per wire. To overcome this challenge, the single-line multi-channel signal (SLMC) measurement has been developed, enabling simultaneous detection of multiple sensor signals through one or two signal wires, which effectively reduces the number of signal wires, thereby enhancing stability, deformability, and reliability. This review offers a general knowledge of SLMC measurement beginning with flexible stress sensors and their piezoresistive, capacitive, piezoelectric, and triboelectric sensing mechanisms. A further discussion is given on different arraying methods and their corresponding advantages and disadvantages. Finally, this review categorizes existing SLMC measurement methods into RLC series resonant sensing, transmission line sensing, ionic conductor sensing, triboelectric sensing, piezoresistive sensing, and distributed fiber optic sensing based on their mechanisms, describes the mechanisms and characteristics of each method and summarizes the research status of SLMC measurement.

This paper introduces a chip-level oven-controlled system for improving the temperature stability of MEMS resonators wherein we designed the resonator and the micro-hotplate using MEMS technology, then bounding them in a package shell at the chip level. The resonator is transduced by AlN film, and its temperature is monitored by temperature-sensing resistors on both sides. The designed micro-hotplate is placed at the bottom of the resonator chip as a heater and insulated by airgel. The PID pulse width modulation (PWM) circuit controls the heater according to the temperature detection result to provide a constant temperature for the resonator. The proposed oven-controlled MEMS resonator (OCMR) exhibits a frequency drift of 3.5 ppm. Compared with the previously reported similar methods, first, the OCMR structure using airgel combined with a micro-hotplate is proposed for the first time, and the working temperature is extended from 85 °C to 125 °C. Second, our work does not require redesign or additional constraints on the MEMS resonator, so the proposed structure is more general and can be practically applied to other MEMS devices that require temperature control.

Nanomechanical resonators made from suspended graphene exhibit high sensitivity toward pressure variations. Nevertheless, these devices exhibit significant energy loss in nonvacuum environments due to air damping, as well as inevitably weak gas leakage within the reference cavity because of the slight permeation of graphene. We present a new type of graphene resonant pressure sensor utilizing micro-opto-electro-mechanical systems technology, which features a multilayer graphene membrane that is sealed in vacuum and adhered to pressure-sensitive silicon film with grooves. This approach innovatively employs an indirectly sensitive method, exhibiting 60 times smaller energy loss in atmosphere, and solving the long-standing issue of gas permeation between the substrate and graphene. Notably, the proposed sensor exhibits a high pressure sensitivity of 1.7 Hz/Pa, which is 5 times higher than the sensitivity of the silicon counterparts. Also, the all-optical encapsulating cavity structure contributes a high signal-to-noise ratio of 6.9 × 10-5 Pa-1 and a low temperature drift (0.014%/◦C). The proposed method offers a promising solution for long-term stability and energy loss suppression of pressure sensors using two-dimensional materials as the sensitive membrane.

The correct detection and quantification of pollutants in water is key to regulating their presence in the environment. Biosensors offer several advantages, such as minimal sample preparation, short measurement times, high specificity and sensibility and low detection limits. The purpose of this review is to explore the different types of optical biosensors, focusing on their biological elements and their principle of operation, as well as recent applications in the detection of pollutants in water. According to our literature review, 33% of the publications used fluorescence-based biosensors, followed by surface plasmon resonance (SPR) with 28%. So far, SPR biosensors have achieved the best results in terms of detection limits. Although less common (22%), interferometers and resonators (4%) are also highly promising due to the low detection limits that can be reached using these techniques. In terms of biological recognition elements, 43% of the published works focused on antibodies due to their high affinity and stability, although they could be replaced with molecularly imprinted polymers. This review offers a unique compilation of the most recent work in the specific area of optical biosensing for water monitoring, focusing on both the biological element and the transducer used, as well as the type of target contaminant. Recent technological advances are discussed.

Acoustic deficiencies due to lack of absorption in indoor spaces may sometime render significant buildings unfit for their purpose, especially the ones used as speech auditoria. This study investigates the potential of designing wideband acoustic absorbers composed of parallel-arranged micro-perforated panels (MPPs), known as efficient absorbers that do not need any other fibrous/porous material to have a high absorptive performance. It aims to integrate architectural trends such as transparency and the use of raw materials with acoustical constraints to ensure optimal indoor acoustic conditions. It proposes a structure composed of four parallel-arranged MPPs, which have been theoretically modelled using the electrical Equivalent Circuit Model (ECM) and implemented on an acrylic prototype using recent techniques such as CNC machining tools. The resulting samples are experimentally analysed for their absorption efficiency through the ISO-10534-2 method in an impedance tube. The results show that the prediction model and the experimental data are in good agreement. Afterward, the investigation focuses on applying the most absorptive MPP structure in a classroom without acoustic treatment through numerical simulations in ODEON 16 Acoustics Software. When the proposed material is installed as a wall panel, the results show an improvement toward optimum values in Reverberation Time (RT30) and Speech Transmission Index (STI).

Planar microwave sensors have become increasing developed in recent decades, especially in material characterization (solid/liquid) as they provide regions highly sensitive to the surrounding medium. However, when it comes to deciphering the content of practical biological analytes or chemical components inside a host medium, even higher sensitivities are required due to their minute concentrations. This review article presents a comprehensive outlook on various methodologies to enhance sensitivity (e.g., coupling resonators, channel embedding, analyte immobilization, resonator pattern recognition, use of phase variation, using coupled line section, and intermodulation products), resolution (active sensors, differential measurements), and robustness (using machine learning) of arbitrary sensors of interest. Some of the most practical approaches are presented with prototype examples, and the main applications of incorporating such procedures are reported. Sensors with which the proposed techniques are implemented exhibit higher performance for high-end and real-life use.