magnetorheological finishing

磁流变精加工
  • 文章类型: Journal Article
    本工作旨在研究磁流变精加工工艺的影响,利用低频交变磁场,6063铝合金的精加工性能。该研究调查了关键励磁参数的影响,如电流,频率,激励间隙,和铁粉直径对成品工件的材料去除和表面粗糙度(Ra)的影响。本研究采用单因素实验方法,并通过Zigo非接触白光干涉仪对光洁度表面进行分析。加工区域的磁场强度随励磁电流的增大而增大,随励磁间隙的增大而减小。当当前频率设置为1Hz时,磨料在磁簇中的循环和更新是最充分的,导致工件的最佳表面粗糙度值。根据激励参数的实验结果,选择更合适的工艺参数进行两阶段整理实验。6063铝合金的表面粗糙度由285nm提高到3.54nm。实验结果表明,使用低频交变磁场的磁流变精加工是获得6063铝合金纳米级精加工的潜在技术。
    The present work is aimed at studying the effects of the magnetorheological finishing process, using a low-frequency alternating magnetic field, on the finishing performance of 6063 aluminum alloy. The study investigates the influence of key excitation parameters such as current, frequency, excitation gap, and iron powder diameter on the material removal and surface roughness (Ra) of the finished workpiece by experiments. This study employs a single-factor experimental method, and the finish surface is analyzed by a Zigo non-contact white light interferometer. The magnetic field strength in the processing area increases with the increase in the excitation current and decreases with the increase in the excitation gap. When the current frequency is set to 1 Hz, the circulation and renewal of abrasives in the magnetic cluster is most sufficient, resulting in the optimal surface roughness value for the workpiece. According to the experimental results of the excitation parameters, more suitable process parameters were selected for a two-stage finishing experiment. The surface roughness of 6063 aluminum alloy was improved from 285 nm to 3.54 nm. Experimental results highlighted that the magnetorheological finishing using a low-frequency alternating magnetic field is a potential technique for obtaining nano-scale finishing of the 6063 aluminum alloy.
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  • 文章类型: Journal Article
    在本文中,为了实现光学元件的高精度磁流变光整加工,根据脉冲迭代原理,提出了一种基于粒子群优化算法的停留时间优化方法。停留时间优化方法通过将最终曲面的精度值与设定值进行比较,探索解空间中的最优解。这样,停留时间优化方法能够实现整体停留时间和每个停留时间点的全局优化,最终实现表面的高精度加工。通过对两个Φ156mm沥青反射镜(1#和2#)的仿真,1#的均方根(RMS)和峰谷(PV)值从169.164nm和1161.69nm的初始值收敛到24.79nm和911.53nm。同样,2#的RMS和PV值从187.27nm和1694.05nm的初始值收敛到31.76nm和1045.61nm。仿真结果表明,与一般脉冲迭代法相比,在处理时间几乎相同的情况下,该算法可以获得更准确的每个点的停留时间分布,随后获得了更好的收敛面,减少了中间空间误差。最后,实验验证了优化算法的准确性。实验结果表明,优化后的算法可用于高精度表面加工。总的来说,该优化方法为光学元件磁流变精加工过程中的停留时间计算提供了解决方法。
    In this paper, a dwell time optimization method based on the particle swarm optimization algorithm is proposed according to the pulse iteration principle in order to achieve high-precision magnetorheological finishing of optical components. The dwell time optimization method explores the optimal solution in the solution space by comparing the accuracy value of the final surface with the set value. In this way, the dwell time optimization method was able to achieve global optimization of the overall dwell times and each dwell time point, ultimately realizing the high-precision processing of a surface. Through the simulation of two Φ156 mm asphaltic mirrors (1# and 2#), the root-mean-square (RMS) and peak-valley (PV) values of 1# converged from the initial values of 169.164 nm and 1161.69 nm to 24.79 nm and 911.53 nm. Similarly, the RMS and PV values of 2# converged from the initial values of 187.27 nm and 1694.05 nm to 31.76 nm and 1045.61 nm. The simulation results showed that compared with the general pulse iteration method, the proposed algorithm could obtain a more accurate dwell time distribution of each point under the condition of almost the same processing time, subsequently acquiring a better convergence surface and reducing mid-spatial error. Finally, the accuracy of the optimization algorithm was verified through experiments. The experimental results demonstrated that the optimized algorithm could be used to perform high-precision surface machining. Overall, this optimization method provides a solution for dwell time calculation in the process of the magnetorheological finishing of optical components.
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  • 文章类型: Journal Article
    NiP涂层具有优异的物理化学性能,是光学元件的最佳涂层材料之一。在光学元件上处理NiP涂层时,一般采用单点金刚石车削(SPDT)作为第一工序。然而,SPDT车削在工件上产生周期性车削图案,影响组件的光学性能。磁流变精加工(MRF)是一种基于计算机控制的光学表面成形的确定性子孔径抛光工艺,可以校正表面形状误差并提高工件的表面质量。本文分析了NiP涂层的特性,开发了一种专门用于NiP涂层加工的磁流变液。根据普雷斯顿的基本原理,建立了NiP涂层MRF抛光的材料去除模型,并通过正交试验对MRF制造工艺进行了优化。优化的MRF抛光工艺可快速从NiP涂层表面去除SPDT车刀图案,并校正表面轮廓误差。同时,NiP涂层的表面质量也得到了改善,随着表面粗糙度从SPDT车削的Ra2.054nm增加到Ra0.705nm。
    NiP coating has excellent physicochemical properties and is one of the best materials for coating optical components. When processing NiP coatings on optical components, single-point diamond turning (SPDT) is generally adopted as the first process. However, SPDT turning produces periodic turning patterns on the workpiece, which impacts the optical performance of the component. Magnetorheological finishing (MRF) is a deterministic sub-aperture polishing process based on computer-controlled optical surface forming that can correct surface shape errors and improve the surface quality of workpieces. This paper analyzes the characteristics of NiP coating and develops a magnetorheological fluid specifically for the processing of NiP coating. Based on the basic Preston principle, a material removal model for the MRF polishing of NiP coating was established, and the MRF manufacturing process was optimized by orthogonal tests. The optimized MRF polishing process quickly removes the SPDT turning tool pattern from the NiP coating surface and corrects surface profile errors. At the same time, the surface quality of the NiP coating has also been improved, with the surface roughness increasing from Ra 2.054 nm for SPDT turning to Ra 0.705 nm.
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  • 文章类型: Journal Article
    在高功率激光系统中,大功率激光组件表面的中空间频率误差会影响大功率激光系统的正常工作。为了改善高功率激光元件磁流变精加工后的中空间频率误差,研究了磁流变精加工中带波动的原因和影响因素,研究了不同色带波动对表面中空间频率误差的影响。首先,用计算机模拟了不同的色带波动对加工表面中间空间频率误差的影响。其次,抛光轮圆周方向的磁场,测量磁流变抛光带的波动量和频率,然后分析了磁流变抛光带波动的原因。此外,通过单一变量的原理,探讨了工艺参数对磁流变抛光带波动的影响。最后,在磁流变抛光带波动为40μm的工艺参数下,对熔融石英组分进行均匀扫描,80μm,150μm,和200μm。实验结果表明,色带波动越大,组件的表面中间空间频率误差越大,并且带波动与部件表面上的中空间频带中的PSD2的RMS近似成线性关系。因此,可以通过控制磁流变工艺参数来控制色带的波动,通过优化磁流变精加工后的工艺参数,可以显著降低高功率激光组件表面的中空间频带误差。
    In the high-power laser system, the mid-spatial frequency error of the surface of the high-power laser component will affect the normal operation of the high-power laser system. In order to improve the mid-spatial frequency error of the high-power laser component after magnetorheological finishing, the causes and influencing factors of the ribbon fluctuation in magnetorheological finishing are studied, and the influence of different ribbon fluctuation on the mid-spatial frequency error of the surface is studied. Firstly, the influence of different ribbon fluctuations on the mid-spatial frequency error of the machined surface is simulated by a computer. Secondly, the magnetic field in the circumferential direction of the polishing wheel, the fluctuation amount and frequency of the magnetorheological polishing ribbon are measured, and then the causes of the fluctuation of the magnetorheological polishing ribbon are analyzed. Moreover, through the principle of a single variable, the influence of process parameters on the fluctuation of magnetorheological polishing ribbon is explored. Finally, the fused silica component is scanned uniformly under the process parameters of magnetorheological polishing ribbon fluctuation of 40 μm, 80 μm, 150 μm, and 200 μm. The experimental results show that the greater the ribbon fluctuation, the greater the surface mid-spatial frequency error of the component, and the ribbon fluctuation is approximately linear with the RMS of the PSD2 in the mid-spatial frequency band on the surface of the component. Therefore, the fluctuation of the ribbon can be controlled by controlling the magnetorheological processing parameters, and the mid-spatial frequency band error on the surface of the high-power laser component can be significantly reduced by optimizing process parameters after magnetorheological finishing.
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  • 文章类型: Journal Article
    提高熔融石英光学器件的抗激光损伤能力是科学研究的热点。目前,已经生产了各种现代工艺来提高熔融石英光学器件的激光诱导损伤阈值(LIDT)。它们包括以柔性计算机控制的光学堆焊(CCOS)为代表的预处理工艺,磁流变精加工(MRF),离子束精加工(IBF),和以动态化学蚀刻(DCE)为代表的后处理工艺。这些都取得了显著的成效。然而,还有一些问题亟待解决,例如过多的材料去除,DCE工艺中的表面精度波动,以及MRF过程中的污染,等。针对以上问题,MRF,CCOS,IBF和浅DCE组合技术用于处理熔融石英光学器件。可以极大地控制表面形貌,并减少化学蚀刻深度,而LIDT稳步增长。经过这种组合技术处理后,LIDT提高到12.1J/cm2,熔融石英的抗激光损伤性能显著增强。总的来说,MRF,IBF,CCOS和浅层DCE结合技术为增强熔融石英的抗激光损伤能力带来了很大的帮助,并可作为熔融石英制造过程中的工艺路线。
    The enhancement of laser damage resistance of fused silica optics was a hotspot in scientific research. At present, a variety of modern processes have been produced to improve the laser induced damage threshold (LIDT) of fused silica optics. They included pre-treatment processes represented by flexible computer controlled optical surfacing (CCOS), magnetorheological finishing (MRF), ion beam finishing (IBF), and post-treatment processes represented by dynamic chemical etching (DCE). These have achieved remarkable results. However, there are still some problems that need to be solved urgently, such as excessive material removal, surface accuracy fluctuation in the DCE process, and the pollution in MRF process, etc. In view of above problems, an MRF, CCOS, IBF and shallow DCE combined technique was used to process fused silica optics. The surface morphology could be greatly controlled and chemical etching depth was reduced, while the LIDT increased steadily. After processing by this combined technique, the LIDT increased to 12.1 J/cm2 and the laser damage resistance properties of fused silica were significantly enhanced. In general, the MRF, IBF, CCOS and shallow DCE combined technique brought much help to the enhancement of laser damage resistance of fused silica, and could be used as a process route in the manufacturing process of fused silica.
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  • 文章类型: Journal Article
    Although magnetorheological finishing (MRF) is being widely utilized to achieve ultra-smooth optical surfaces, the mechanisms for obtaining such extremely low roughness after the MRF process are not fully understood, especially the impact of finishing stresses. Herein we carefully investigated the relationship between the stresses and surface roughness. Normal stress shows stronger impacts on the surface roughness of fused silica (FS) when compared with the shear stress. In addition, normal stress in the polishing zone was found to be sensitive to the immersion depth of the magnetorheological (MR) fluid. Based on the above, a fine tuning of surface roughness (RMS: 0.22 nm) was obtained. This work fills gaps in understanding about the stresses that influence surface roughness during MRF.
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  • 文章类型: Journal Article
    The cubic Fe3O4 nanoparticles with sharp horns that display the size distribution between 100 and 200 nm are utilized to substitute the magnetic sensitive medium (carbonyl iron powders, CIPs) and abrasives (CeO2/diamond) simultaneously which are widely employed in conventional magnetorheological finishing fluid. The removal rate of this novel fluid is extremely low compared with the value of conventional one even though the spot of the former is much bigger. This surprising phenomenon is generated due to the small size and low saturation magnetization (M s) of Fe3O4 and corresponding weak shear stress under external magnetic field according to material removal rate model of magnetorheological finishing (MRF). Different from conventional D-shaped finishing spot, the low M s also results in a shuttle-like spot because the magnetic controllability is weak and particles in the fringe of spot are loose. The surface texture as well as figure accuracy and PSD1 (power spectrum density) of potassium dihydrogen phosphate (KDP) is greatly improved after MRF, which clearly prove the feasibility of substituting CIP and abrasive with Fe3O4 in our novel MRF design.
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