在高功率激光系统中,大功率激光组件表面的中空间频率误差会影响大功率激光系统的正常工作。为了改善高功率激光元件磁流变精加工后的中空间频率误差,研究了磁流变精加工中带波动的原因和影响因素,研究了不同色带波动对表面中空间频率误差的影响。首先,用计算机模拟了不同的色带波动对加工表面中间空间频率误差的影响。其次,抛光轮圆周方向的磁场,测量磁流变抛光带的波动量和频率,然后分析了磁流变抛光带波动的原因。此外,通过单一变量的原理,探讨了工艺参数对磁流变抛光带波动的影响。最后,在磁流变抛光带波动为40μm的工艺参数下,对熔融石英组分进行均匀扫描,80μm,150μm,和200μm。实验结果表明,色带波动越大,组件的表面中间空间频率误差越大,并且带波动与部件表面上的中空间频带中的PSD2的RMS近似成线性关系。因此,可以通过控制磁流变工艺参数来控制色带的波动,通过优化磁流变精加工后的工艺参数,可以显著降低高功率激光组件表面的中空间频带误差。
In the high-power laser system, the mid-spatial frequency error of the surface of the high-power laser component will affect the normal operation of the high-power laser system. In order to improve the mid-spatial frequency error of the high-power laser component after magnetorheological finishing, the causes and influencing factors of the ribbon fluctuation in magnetorheological finishing are studied, and the influence of different ribbon fluctuation on the mid-spatial frequency error of the surface is studied. Firstly, the influence of different ribbon fluctuations on the mid-spatial frequency error of the machined surface is simulated by a computer. Secondly, the magnetic field in the circumferential direction of the polishing wheel, the fluctuation amount and frequency of the magnetorheological polishing ribbon are measured, and then the causes of the fluctuation of the magnetorheological polishing ribbon are analyzed. Moreover, through the principle of a single variable, the influence of process parameters on the fluctuation of magnetorheological polishing ribbon is explored. Finally, the fused silica component is scanned uniformly under the process parameters of magnetorheological polishing ribbon fluctuation of 40 μm, 80 μm, 150 μm, and 200 μm. The experimental results show that the greater the ribbon fluctuation, the greater the surface mid-spatial frequency error of the component, and the ribbon fluctuation is approximately linear with the RMS of the PSD2 in the mid-spatial frequency band on the surface of the component. Therefore, the fluctuation of the ribbon can be controlled by controlling the magnetorheological processing parameters, and the mid-spatial frequency band error on the surface of the high-power laser component can be significantly reduced by optimizing process parameters after magnetorheological finishing.