High-performance nanoflow liquid-phase separation techniques such as nanoflow liquid chromatography (nanoLC), capillary electrophoresis (CE), and microchip chromatography and electrophoresis (chip-ICP-MS) have been hyphenated with inductively coupled plasma mass spectrometry (ICP-MS) extensively. This hyphenation combines the excellent characteristics of the front-end separation technology, such as high selectivity, sensitivity, and speed, and low sample consumption, and the advantages of back-end ICP-MS, such as high resolution, wide dynamic range, and absolute quantification capability. Thus, such hyphenation is becoming an increasingly important analytical tool. Herein we systematically introduce the recent development of hyphenated nanoLC, CE, and chip-ICP-MS, review its application in chemical and biochemical analysis, and discuss potential future developments of hyphenating these technologies.