现代非弹性X射线光谱仪采用弯曲,弯曲和切块分析仪,以捕获从样品发出的径向发射散射辐射的足够大的立体角。制造这些复杂的分析仪,特别是当需要几毫伏的高能量分辨率时,非常耗时,昂贵,而且经常是一败涂地。介绍了一种新颖的制造技术,利用凹球形,微孔铝基底,以保持薄玻璃基板与切割的晶体晶片结合在其上的组件。在均匀的真空力下,将玻璃基板拉入铝基板中,实现所需的弯曲半径,而衍射晶体层的切割防止了弯曲应变施加在各个晶体像素上。这种技术消除了将晶体组件永久粘合到凹透镜的需要,提供纠正数字错误的机会,避免永久债券的长期退化,并使透镜和水晶可重复使用。因此工艺和材料成本显著降低。两台分析仪,Si(844)和Ge(337)的本征分辨率为14.6meV和36.5meV,分别,以这种方式生产,并在共振非弹性X射线散射(RIXS)测量中表征。两种分析仪的总能量分辨率对于Si(844)为29.4meV,对于Ge(337)为56.6meV。尽管RIXS技术对分析仪缺陷非常敏感,分析仪被发现是平等的,如果不是优越的,在质量上达到他们的传统,永久保税同行。
Modern inelastic X-ray spectrometers employ curved, bent and diced analyzers to capture sufficiently large solid angles of radially emitted scattered radiation emanating from the sample. Fabricating these intricate analyzers, especially when a high energy resolution of a few millielectronvolts is required, is very time-consuming, expensive and often a hit-or-miss affair. A novel fabrication technique is introduced, utilizing a concave-spherical, microporous aluminium base to hold an assembly of a thin glass substrate with a diced crystal wafer bonded to it. Under uniform vacuum forces, the glass substrate is drawn into the aluminium base, achieving the desired bending radius, while dicing of the diffracting crystal layer prevents bending strain from being imposed on the individual crystal pixels. This technique eliminates the need for permanently bonding the crystal assembly to the concave lens, offering the opportunity for correcting figure errors, avoiding long-term degradation of the permanent bond, and making both lens and crystal reusable. Process and material costs are thus substantially decreased. Two analyzers, Si(844) and Ge(337) with intrinsic resolutions of 14.6 meV and 36.5 meV, respectively, were produced in this fashion and characterized in resonant inelastic X-ray scattering (RIXS) measurements. The achieved overall energy resolutions for both analyzers were 29.4 meV for Si(844) and 56.6 meV for Ge(337). Although the RIXS technique is veru sensitive to analyzer imperfections, the analyzers were found to be equal, if not superior, in quality to their traditional, permanently bonded counterparts.