capacitive sensor

电容式传感器
  • 文章类型: Journal Article
    背景:准确的实时眼动跟踪在动眼系统研究中至关重要。虽然巩膜搜索线圈系统是黄金标准,其植入程序和体积构成挑战。基于相机的系统受到环境照明的影响,并且需要高的计算和电力。新方法本研究提出了一种新颖的眼睛跟踪器,该跟踪器使用由碳纳米管纸复合材料(CPC)制成的接近电容传感器。这些传感器检测在水平和垂直眼睛旋转期间由灵长类角膜运动引起的飞法水平电容变化。对数据处理和机器学习算法进行评估,以提高注视角度预测的准确性。
    结果:在平稳的追求过程中,系统性能以巩膜线圈为基准,扫视跟踪,和固定。眼睛跟踪器在眼睛跟踪中显示出高达0.97的与线圈的相关性,并且能够以低至0.30°的中值绝对误差估计注视角度。比较与黄金标准巩膜搜索线圈方法相比,电容式眼睛跟踪器展示出良好的一致性和准确性。
    结论:这种轻量级,在动眼研究和视觉科学中,非侵入性电容式眼动仪提供了替代传统线圈和基于相机的系统的潜力。
    BACKGROUND: Accurate real-time eye tracking is crucial in oculomotor system research. While the scleral search coil system is the gold standard, its implantation procedure and bulkiness pose challenges. Camera-based systems are affected by ambient lighting and require high computational and electric power.
    METHODS: This study presents a novel eye tracker using proximity capacitive sensors made of carbon-nanotube-paper-composite (CPC). These sensors detect femtofarad-level capacitance changes caused by primate corneal movement during horizontal and vertical eye rotations. Data processing and machine learning algorithms are evaluated to enhance the accuracy of gaze angle prediction.
    RESULTS: The system performance is benchmarked against the scleral coil during smooth pursuits, saccades tracking, and fixations. The eye tracker demonstrates up to 0.97 correlation with the coil in eye tracking and is capable of estimating gaze angle with a median absolute error as low as 0.30°.
    UNASSIGNED: The capacitive eye tracker demonstrates good consistency and accuracy in comparison to the gold-standard scleral search coil method.
    CONCLUSIONS: This lightweight, non-invasive capacitive eye tracker offers potential as an alternative to traditional coil and camera-based systems in oculomotor research and vision science.
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  • 文章类型: Journal Article
    与传统的无损检测(NDT)和无损评估(NDE)方法相比,包括射线照相,超声,和涡流分析,共面电容传感技术是该领域中一种新颖且有前途的途径。本文试图阐明共面电容传感的功效,也称为电容成像(CI),在无损检测领域内。利用现存的学术话语,这篇综述对共面电容技术进行了全面而有条理的研究,包含其基本原则,影响传感器功效的因素,以及跨各种NDT域进行缺陷识别的各种应用。此外,这篇综述讨论了现有的挑战,并预测了该技术的未来发展轨迹。与传统的NDT方法相比,共面电容感测固有的多种优势不仅提供了其在应用中的多功能性,而且还强调了其在未来应用中开创性进步的潜力。
    In contrast to conventional non-destructive testing (NDT) and non-destructive evaluation (NDE) methodologies, including radiography, ultrasound, and eddy current analysis, coplanar capacitive sensing technique emerges as a novel and promising avenue within the field. This paper endeavors to elucidate the efficacy of coplanar capacitive sensing, also referred to as capacitive imaging (CI), within the realm of NDT. Leveraging extant scholarly discourse, this review offers a comprehensive and methodical examination of the coplanar capacitive technique, encompassing its fundamental principles, factors influencing sensor efficacy, and diverse applications for defect identification across various NDT domains. Furthermore, this review deliberates on extant challenges and anticipates future trajectories for the technique. The manifold advantages inherent to coplanar capacitive sensing vis-à-vis traditional NDT methodologies not only afford its versatility in application but also underscore its potential for pioneering advancements in forthcoming applications.
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  • 文章类型: Journal Article
    这项研究证明了醋酸纤维素(CA)涂覆的丝网印刷碳电极(SPCE)用于土壤微生物活性检测。电容式传感器设计利用涂层CA层在电解质中有效绝缘,消除了额外的信号保护的需要。优化涉及比较旋涂和浸涂方法,一层10秒浸涂被确定为质量和产量之间的最佳平衡。这些CA/SPCE在一个月内表现出显著的稳定性,表明它们长期用于监测农业土壤的潜力。CA/SPCE轮廓和厚度的分析提供了对表面特性和CA涂层对电极粗糙度的影响的见解。ATR-FTIR分析,随着电容传感,与机械仪表相比,显示出较高的灵敏度和精度用于监测CA膜降解。化学降解研究表明CA在近中性环境中的潜在免疫力,虽然酶降解研究揭示了酶的优势,特别是在初始阶段。CA/SPCE传感器响应酶和化学降解,可能作为土壤微生物总活性的指标。土壤实验探索了CA/SPCE与Cap-S的微生物活性传感。与对照相比,在富含菌根真菌的土壤中观察到长期降解速率的显着差异,强调微生物的影响。这项研究强调了这项技术的适应性和多功能性,特别是用于评估农田中的C循环微生物活性。
    This study demonstrates cellulose acetate (CA)-coated screen-printed carbon electrodes (SPCEs) for soil microbial activity detection. A capacitive sensor design utilizes a coated CA layer for effective insulation in electrolytes, eliminating the need for additional signal protection. Optimization involved comparing spin and dip coating methods, with a one-layer 10-second dip coating identified as the best balance between quality and yield. These CA/SPCEs exhibited remarkable stability over a month, suggesting their potential for long-term use in monitoring agricultural soils. Analysis of CA/SPCE profile and thickness provided insights into surface characteristics and the impact of the CA coating on electrode roughness. ATR-FTIR analysis, along with capacitive sensing, demonstrated superior sensitivity and precision for monitoring CA film degradation compared to mechanical gauges. Chemical degradation studies suggest CA\'s potential immunity in near-neutral environments, while enzymatic degradation investigations revealed dominance by enzymes, particularly in the initial stages. The CA/SPCE sensor responds to both enzymatic and chemical degradation, potentially serving as an indicator of total soil microbial activity. Soil experiments explored CA/SPCE with Cap-S for microbial activity sensing. Significant differences in the long-term degradation rate were observed in mycorrhizal fungi-enriched soil compared to controls, highlighting microbial influences. This study underscores the adaptability and versatility of this technology, particularly for assessing C-cycle microbial activity in agricultural fields.
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  • 文章类型: Journal Article
    在某些领域需要快速感知湿度变化,例如在燃料电池车辆中。用于相对湿度(RH)测量的微湿度传感器具有快速响应特性,其数值模型和方法很少见。本文首先提出了平行板电容器的数值模型和方法,并对其动态特性进行了数值分析。该传感器的制造是根据数值结果进行的,and,显示了其湿敏元件的主要特性。这种平行板电容器使用互补金属氧化物半导体(CMOS)兼容技术制成,用P型单晶硅晶片作为衬底,在上栅电极和下平行板电极之间的聚酰亚胺薄膜(PI),和具有钼铝双层结构的电极。微传感器的形状是正方形的,在源场的侧面上具有3mm。湿度传感器的线性度为0.9965,在7.408%RH时滞后,灵敏度为0.4264pF/%RH。当相对湿度从33.2%RH增加到75.8%RH时,传感器显示平均吸附时间为1s,最小吸附时间为850ms。该传感器在25°C环境中的240h测试期间表现出非常好的稳定性。本研究提供的数值模型和方法对于预测平行板电容器的性能非常有用。
    Quickly sensing humidity changes is required in some fields, such as in fuel cell vehicles. The micro humidity sensor used for the relative humidity (RH) measurement with fast response characteristics, and its numerical model and method are rare. This paper firstly presents a numerical model and method for a parallel plate capacitor and a numerical analysis of its dynamic characteristics. The fabrication of this sensor was carried out based on the numerical results, and, the main characteristics of its moisture-sensitive element are shown. This parallel plate capacitor is made using complementary metal-oxide semiconductor (CMOS)-compatible technology, with a P-type monocrystalline silicon wafer used as the substrate, a thin polyimide film (PI) between the upper grid electrode and the lower parallel plate electrode, and electrodes with a molybdenum-aluminum bilayer structure. The shape of the micro sensor is square with 3 mm on the side of the source field. The humidity sensor has a linearity of 0.9965, hysteresis at 7.408% RH, and a sensitivity of 0.4264 pF/%RH. The sensor displays an average adsorption time of 1 s and a minimum adsorption time of 850 ms when the relative humidity increases from 33.2% RH to 75.8% RH. The sensor demonstrates very good stability during a 240 h test in a 25 °C environment. The numerical model and method provided by this study are very useful for predicting the performance of a parallel plate capacitor.
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  • 文章类型: Journal Article
    与机械传感器物理学的理解有关的杰出事件发生了,并在70年前的1954年宣布。这个事件是压阻效应的发现,这导致了半导体应变计的发展,其灵敏度远高于以前在传统金属应变计中获得的灵敏度。反过来,这激发了随后最早的微机械硅器件和相应的MEMS器件的发展。在过去的几十年中,与传感器相关的科学和技术经历了值得注意的进步,但是压阻效应仍然是许多机械传感器背后的主要物理现象,无论是商业模型还是研究模型。在这70周年之际,本教程旨在解释工作原理,亚型,输入-输出特性,以及三种主要类型的机械传感器的局限性:应变仪,电容式传感器,和压电传感器。这三种传感器技术也相互比较,突出每个人的主要优点和缺点。
    An outstanding event related to the understanding of the physics of mechanical sensors occurred and was announced in 1954, exactly seventy years ago. This event was the discovery of the piezoresistive effect, which led to the development of semiconductor strain gauges with a sensitivity much higher than that obtained before in conventional metallic strain gauges. In turn, this motivated the subsequent development of the earliest micromachined silicon devices and the corresponding MEMS devices. The science and technology related to sensors has experienced noteworthy advances in the last decades, but the piezoresistive effect is still the main physical phenomenon behind many mechanical sensors, both commercial and in research models. On this 70th anniversary, this tutorial aims to explain the operating principle, subtypes, input-output characteristics, and limitations of the three main types of mechanical sensor: strain gauges, capacitive sensors, and piezoelectric sensors. These three sensor technologies are also compared with each other, highlighting the main advantages and disadvantages of each one.
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  • 文章类型: Journal Article
    对纤维增强聚合物(FRP)的需求由于其属性而在各个行业显着增加,包括低重量,高强度,耐腐蚀性,和成本效益。然而,FRP,如玻璃和凯夫拉纤维复合材料,表现出各向异性特性和相对较低的层间强度,使它们容易受到未被发现的损害。实时损伤检测过程的集成可以有效地缓解这个问题。本文介绍了一种使用涂层技术在FRP内制造嵌入式电容传感器的新方法。这项研究包括两种类型的纤维,即玻璃和Kevlar纤维/环氧树脂复合材料。采用物理气相沉积(PVD)技术在纤维束上涂覆导电材料,从而创建嵌入式电极。结果表明,使用PVD,金(Au)纳米颗粒沿纤维均匀分布,导致大约≈100Ω的有利电阻。探索了两种传感器配置:轴向和横向嵌入涂层纱线(电极),以研究负载方向对涂层纱线的影响。轴向传感器配置样品进行拉伸测试,展示了对轴向载荷的线性响应,玻璃的平均灵敏度为1,凯夫拉纤维/环氧树脂复合材料的平均灵敏度为1.5。此外,在两种类型的纤维复合材料中都检测到起始损伤,发生在最终骨折之前,在转折点的平均应力为208MPa的玻璃和144MPa的Kevlar。玻璃纤维增强聚合物(GFRP)的横向传感器配置对应变表现出良好的线性,直到失效为止,x轴和y轴的平均规范系数为0.25和-2.44,分别。
    The demand for fiber-reinforced polymers (FRPs) has significantly increased in various industries due to their attributes, including low weight, high strength, corrosion resistance, and cost-efficiency. Nevertheless, FRPs, such as glass and Kevlar fiber composites, exhibit anisotropic properties and relatively low interlaminar strength, rendering them susceptible to undetected damage. The integration of real-time damage detection processes can effectively mitigate this issue. This paper introduces a novel method for fabricating embedded capacitive sensors within FRPs using a coating technique. The study encompasses two types of fibers, namely glass and Kevlar fiber/epoxy composites. The physical vapor deposition (PVD) technique is employed to coat bundle fibers with conductive material, thus creating embedded electrodes. The results demonstrate the uniform distribution of nanoparticles of gold (Au) along the fibers using PVD, resulting in a favorable resistance of approximately ≈100 Ω. Two sensor configurations are explored: axial and lateral embedding of the coated yarn (electrodes) to investigate the influence of load direction on the coating yarn. Axial-sensor configuration specimens undergo tensile testing, showcasing a linear response to axial loads with average sensitivities of 1 for glass and 1.5 for Kevlar fiber/epoxy composites. Additionally, onset damage is detected in both types of fiber composites, occurring before final fracture, with average stress at the turning point measuring 208 MPa for glass and 144 MPa for Kevlar. The lateral-sensor configuration for glass fiber-reinforced polymer (GFRP) exhibits good linearity towards strain until failure, with average gauge factors of 0.25 and -2.44 in the x and y axes, respectively.
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  • 文章类型: Journal Article
    肝细胞癌(HCC)是原发性肝癌的最常见形式,主要影响慢性肝病患者,如乙型肝炎或丙型肝炎引起的肝硬化。诊断通常涉及血液检查(评估肝功能和HCC生物标志物),成像程序,如计算机断层扫描(CT)和磁共振成像(MRI),和肝活检需要切除肝组织进行实验室分析。然而,这些诊断方法要么需要漫长的实验室过程,需要昂贵的成像设备,或者涉及肝活检等侵入性技术。因此,迫切需要快速,成本效益高,和非侵入性技术来表征肝癌,无论是血清还是组织样本。在这项研究中,我们开发了一种在印刷电路板(PCB)技术上实施的螺旋传感器,该技术利用阻抗谱技术,并将其应用于24个组织和血清样本作为概念证明。这种新设计的电路已经成功地表征了HCC和正常组织和血清样本。利用不同的介电特性之间的肝癌细胞和血清样品与正常样品在特定的频率范围,实现了正常和HCC样品之间的区分。此外,传感器有效地表征两个HCC等级,并区分肝硬化/非肝硬化样品从组织标本。此外,该传感器将肝硬化/非肝硬化样本与血清样本区分开。这项开创性的研究介绍了电阻抗谱(EIS)螺旋传感器,用于诊断临床血清中的HCC和肝硬化-一种创新,低成本,快速(<2分钟),和精确的基于PCB的技术,无需复杂的样品制备,为疾病分期和肝脏状况提供了一种新的非标记筛查方法。
    Hepatocellular carcinoma (HCC) stands as the most prevalent form of primary liver cancer, predominantly affecting patients with chronic liver diseases such as hepatitis B or C-induced cirrhosis. Diagnosis typically involves blood tests (assessing liver functions and HCC biomarkers), imaging procedures such as Computed Tomography (CT) and Magnetic Resonance Imaging (MRI), and liver biopsies requiring the removal of liver tissue for laboratory analysis. However, these diagnostic methods either entail lengthy lab processes, require expensive imaging equipment, or involve invasive techniques like liver biopsies. Hence, there exists a crucial need for rapid, cost-effective, and noninvasive techniques to characterize HCC, whether in serum or tissue samples. In this study, we developed a spiral sensor implemented on a printed circuit board (PCB) technology that utilizes impedance spectroscopy and applied it to 24 tissues and sera samples as proof of concept. This newly devised circuit has successfully characterized HCC and normal tissue and serum samples. Utilizing the distinct dielectric properties between HCC cells and serum samples versus the normal samples across a specific frequency range, the differentiation between normal and HCC samples is achieved. Moreover, the sensor effectively characterizes two HCC grades and distinguishes cirrhotic/non-cirrhotic samples from tissue specimens. In addition, the sensor distinguishes cirrhotic/non-cirrhotic samples from serum specimens. This pioneering study introduces Electrical Impedance Spectroscopy (EIS) spiral sensor for diagnosing HCC and liver cirrhosis in clinical serum-an innovative, low-cost, rapid (< 2 min), and precise PCB-based technology without elaborate sample preparation, offering a novel non-labeled screening approach for disease staging and liver conditions.
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  • 文章类型: Journal Article
    我们展示了一个自由度软的本体感受反馈控制,气动折纸机器人和两个机器人组装成两个自由度系统。机器人的基本单元是41毫米长,3D打印Kresling风格的结构,有六组侧壁折叠和一个自由度。气动驱动,由负流体压力提供,导致机器人收缩。图案化到机器人上的电容传感器提供位置估计并用作反馈控制器的输入。使用有限元方法,例如,电极形状针对更大(更钝角)折叠角度处的灵敏度进行优化,以改善在致动范围内的控制。我们展示了通过离散时间比例积分微分(PID)控制在单个单元Kresling机器人上通过一系列静态设定点达到17mm的稳定位置控制,动态设定点步进,和正弦信号跟随,误差在3毫米到10毫米的收缩。我们还演示了具有两个自由度的扩展和旋转控制的两单元Kresling机器人,误差为1.7mm和6.1°。这项工作有助于优化电容电极设计和闭环反馈位置控制的演示,而无需视觉跟踪作为输入。这种电容传感和建模方法构成了软折纸机器人中本体感受状态估计和反馈控制的重要一步。
    We demonstrate proprioceptive feedback control of a one degree of freedom soft, pneumatically actuated origami robot and an assembly of two robots into a two degree of freedom system. The base unit of the robot is a 41 mm long, 3-D printed Kresling-inspired structure with six sets of sidewall folds and one degree of freedom. Pneumatic actuation, provided by negative fluidic pressure, causes the robot to contract. Capacitive sensors patterned onto the robot provide position estimation and serve as input to a feedback controller. Using a finite element approach, the electrode shapes are optimized for sensitivity at larger (more obtuse) fold angles to improve control across the actuation range. We demonstrate stable position control through discrete-time proportional-integral-derivative (PID) control on a single unit Kresling robot via a series of static set points to 17 mm, dynamic set point stepping, and sinusoidal signal following, with error under 3 mm up to 10 mm contraction. We also demonstrate a two-unit Kresling robot with two degree of freedom extension and rotation control, which has error of 1.7 mm and 6.1°. This work contributes optimized capacitive electrode design and the demonstration of closed-loop feedback position control without visual tracking as an input. This approach to capacitance sensing and modeling constitutes a major step towards proprioceptive state estimation and feedback control in soft origami robotics.
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  • 文章类型: Journal Article
    随着电容式一侧访问物理传感器的发展,介电测量的能力显着提高。完整的样本没有机会研究单侧接入传感器有效区域部分覆盖的电敏感性;因此,提出了部分样本。对于聚氨酯材料,研究了带有圆柱体和外壳的圆形单侧访问传感器部分覆盖时的电敏感性。相对部分磁化率的实施使我们能够将计算出的磁化率数据转换为0.0-1.0的通用标度,并概述PU材料的主要趋势。部分易感性,相对部分敏感性,相对部分磁化率的变化率与传感器有效区域的覆盖系数有关。相对部分磁化率变化率曲线的总体特征,以线的斜率和中间和间隙附近的变化率之比为特征,与表面电荷密度分布曲线的特征相对应,从数学模型计算。详细阐述的方法可能有助于其他电极配置的电容式OSA传感器的设计和优化。独立于特定的技术解决方案。
    The capability of dielectric measurements was significantly increased with the development of capacitive one-side access physical sensors. Complete samples give no opportunity to study electric susceptibility at a partial coverage of the one-side access sensor\'s active area; therefore, partial samples are proposed. The electric susceptibility at the partial coverage of a circular one-side access sensor with cylinders and shells is investigated for polyurethane materials. The implementation of the relative partial susceptibility permitted us to transform the calculated susceptibility data to a common scale of 0.0-1.0 and to outline the main trends for PU materials. The partial susceptibility, relative partial susceptibility, and change rate of relative partial susceptibility exhibited dependence on the coverage coefficient of the sensor\'s active area. The overall character of the curves for the change rate of the relative partial susceptibility, characterised by slopes of lines and the ratio of the change rate in the centre and near the gap, corresponds with the character of the surface charge density distribution curves, calculated from mathematical models. The elaborated methods may be useful in the design and optimization of capacitive OSA sensors of other configurations of electrodes, independent of the particular technical solution.
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  • 文章类型: Journal Article
    本研究提出了一种基于集成无源器件(IPD)技术制造的生物传感器,可实时测量固体介质上的微生物生长。酵母(巴斯德毕赤酵母,菌株GS115)用作模型生物以证明生物传感器性能。生物传感器包括位于中心的叉指电容器,其具有围绕它的螺旋电感结构。此外,在电容器上增加了12个空气桥,以增加生物传感器在相同高度辐射的电场强度。采用电容式生物传感器验证了其可行性,电容检测过程中电容值随酵母生长的变化表明酵母的生长可引起电参数的变化。拟议的基于IPD的生物传感器用于在1.84GHz的工作频率下测量在3mm培养基上滴下添加100小时的酵母。由于酵母垂直生长过程中菌落高度的变化,生物传感器的共振幅度从24到72小时连续变化,最大变化为0.21dB。总体测量结果也与Gompertz曲线很好地拟合。然后分析24到72小时之间共振幅度的变化,并揭示出与时间的线性关系,决定系数为0.9844,表明该生物传感器适用于监测酵母生长。因此,所提出的生物传感器被证明在微生物增殖检测领域具有潜力。
    This study presents a biosensor fabricated based on integrated passive device (IPD) technology to measure microbial growth on solid media in real-time. Yeast (Pichia pastoris, strain GS115) is used as a model organism to demonstrate biosensor performance. The biosensor comprises an interdigital capacitor in the center with a helical inductive structure surrounding it. Additionally, 12 air bridges are added to the capacitor to increase the strength of the electric field radiated by the biosensor at the same height. Feasibility is verified by using a capacitive biosensor, and the change in capacitance values during the capacitance detection process with the growth of yeast indicates that the growth of yeast can induce changes in electrical parameters. The proposed IPD-based biosensor is used to measure yeast drop-added on a 3 mm medium for 100 h at an operating frequency of 1.84 GHz. The resonant amplitude of the biosensor varies continuously from 24 to 72 h due to the change in colony height during vertical growth of the yeast, with a maximum change of 0.21 dB. The overall measurement results also fit well with the Gompertz curve. The change in resonant amplitude between 24 and 72 h is then analyzed and reveals a linear relationship with time with a coefficient of determination of 0.9844, indicating that the biosensor is suitable for monitoring yeast growth. Thus, the proposed biosensor is proved to have potential in the field of microbial proliferation detection.
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