激光微结构化在过去的几十年中由于其用途广泛而得到了广泛的研究,非接触式加工和出色的精度和结构质量对广泛的材料。该方法的局限性已被确定在利用高平均激光功率,扫描仪的运动从根本上受到惯性定律的限制。在这项工作中,我们应用在固有脉冲按需模式下工作的纳秒紫外激光器,确保在0至20m/s的扫描速度下最大限度地利用最快的商用检流计扫描仪。从处理速度方面分析了高频脉冲按需操作的影响,消融效率,产生的表面质量,重复性,和方法的精确度。此外,激光脉冲持续时间在个位数的纳秒脉冲持续时间中变化,并应用于高通量微结构。我们研究了扫描速度对脉冲按需操作的影响,单程和多程激光冲击钻孔性能,敏感材料的表面结构,脉冲持续时间在1-4ns范围内的消融效率。我们确认了按需脉冲操作在低于1kHz至1.0MHz的频率范围内以5ns的定时精度进行微结构化的适用性,并将扫描仪确定为即使在充分利用时也是限制因素。随着脉冲持续时间的延长,消融效率得到了提高,但结构质量下降。
Laser
microstructuring has been studied extensively in the last decades due to its versatile, contactless processing and outstanding precision and structure quality on a wide range of materials. A limitation of the approach has been identified in the utilization of high average laser powers, with scanner movement fundamentally limited by laws of inertia. In this work, we apply a nanosecond UV laser working in an intrinsic pulse-on-demand mode, ensuring maximal utilization of the fastest commercially available galvanometric scanners at scanning speeds from 0 to 20 m/s. The effects of high-frequency pulse-on-demand operation were analyzed in terms of processing speeds, ablation efficiency, resulting surface quality, repeatability, and precision of the approach. Additionally, laser pulse duration was varied in single-digit nanosecond pulse durations and applied to high throughput
microstructuring. We studied the effects of scanning speed on pulse-on-demand operation, single- and multipass laser percussion drilling performance, surface structuring of sensitive materials, and ablation efficiency for pulse durations in the range of 1-4 ns. We confirmed the pulse-on-demand operation suitability for
microstructuring for a range of frequencies from below 1 kHz to 1.0 MHz with 5 ns timing precision and identified the scanners as the limiting factor even at full utilization. The ablation efficiency was improved with longer pulse durations, but structure quality degraded.