MEMS器件越来越普遍地用作传感器,执行器,以及电子等不同领域的微流体设备,光电,和生物医学工程。传统的制造技术无法满足不断增长的器件小型化和缩短制造时间的需求,特别是当定制的设备是必需的。这就是为什么增材制造技术越来越多地应用于MEMS。在这次审查中,注意力集中在意大利关于3D打印MEMS的情况上,研究用于制造的技术和材料。为了这个目标,进行了如下研究:第一,已经说明了MEMS制造中常用的3D打印技术,然后报道了一些3D打印MEMS的例子。之后,这些技术的典型材料已经被提出,最后,已经描述了它们在MEMS制造中的一些应用示例。总之,3D打印技术的应用,而不是传统工艺,在意大利是一个日益增长的趋势,在那里已经获得了一些令人兴奋和有希望的结果,由于这些新的选择技术和涉及的新材料。
MEMS devices are more and more commonly used as sensors, actuators, and microfluidic devices in different fields like electronics, opto-electronics, and biomedical engineering. Traditional fabrication technologies cannot meet the growing demand for device miniaturisation and fabrication time reduction, especially when customised devices are required. That is why additive manufacturing technologies are increasingly applied to MEMS. In this review, attention is focused on the Italian scenario in regard to 3D-printed MEMS, studying the techniques and materials used for their fabrication. To this aim, research has been conducted as follows: first, the commonly applied 3D-printing technologies for MEMS manufacturing have been illustrated, then some examples of 3D-printed MEMS have been reported. After that, the typical materials for these technologies have been presented, and finally, some examples of their application in MEMS fabrication have been described. In conclusion, the application of 3D-printing techniques, instead of traditional processes, is a growing trend in Italy, where some exciting and promising results have already been obtained, due to these new selected technologies and the new materials involved.