Self-powered wearable piezoelectric sensing devices demand flexibility and high voltage electrical properties to meet personalized health and safety management needs. Aiming at the characteristics of piezoceramics with high piezoelectricity and low flexibility, this study designs a high-performance piezoelectric sensor based on multi-phase barium titanate (BTO) flexible piezoceramic film, namely multi-phase BTO sensor. The substrate-less self-supported multi-phase BTO films had excellent flexibility and could be bent 180° at a thickness of 33 μm, and exhibited good bending fatigue resistance in 1 × 10 4 bending cycles at a thickness of 5 μm. The prepared multi-phase BTO sensor could maintain good piezoelectric stability after 1.2 × 10 4 piezoelectric cycle tests. Based on the flexibility, high piezoelectricity, wearability, portability and battery-free self-powered characteristics of this sensor, the developed smart mask could monitor the respiratory signals of different frequencies and amplitudes in real time. In addition, by mounting the sensor on the hand or shoulder, different gestures and arm movements could also be detected. In summary, the multi-phase BTO sensor developed in this paper is expected to develop convenient and efficient wearable sensing devices for physiological health and behavioral activity monitoring applications.
自供电可穿戴压电传感设备需要柔韧性和高压电性以满足个性化健康安全管理需求。针对压电陶瓷压电性高、柔性差的特点,本文设计了一种基于多相钛酸钡(BTO)柔性压电陶瓷膜的高性能压电传感器,即多相BTO传感器。无衬底自支撑的多相BTO膜具有优异的柔韧性,厚度为33 μm时可实现180°弯曲,厚度为5 μm时可在1 × 10 4次弯曲循环中表现出良好的抗弯曲疲劳性。所制备的多相BTO传感器在经过1.2 × 10 4次压电循环测试后仍能保持良好的压电稳定性。基于此传感器的柔韧性、高压电性、可穿戴性、便携性和无电池自供电特性,开发的智能面罩可以实时监测不同频率和振幅的呼吸信号。此外,将传感器安装在手部或肩部,还可以检测到不同的手势和手臂动作。综上,本文开发的多相BTO传感器有望为生理健康和行为活动监测应用开发出便捷高效的可穿戴传感设备。.