%0 Journal Article %T Atomically Resolved Defect-Engineering Scattering Potential in 2D Semiconductors. %A Chen HY %A Hsu HC %A Liang JY %A Wu BH %A Chen YF %A Huang CC %A Li MY %A Radu IP %A Chiu YP %J ACS Nano %V 18 %N 27 %D 2024 Jul 9 %M 38922204 %F 18.027 %R 10.1021/acsnano.4c02066 %X Engineering atomic-scale defects has become an important strategy for the future application of transition metal dichalcogenide (TMD) materials in next-generation electronic technologies. Thus, providing an atomic understanding of the electron-defect interactions and supporting defect engineering development to improve carrier transport is crucial to future TMDs technologies. In this work, we utilize low-temperature scanning tunneling microscopy/spectroscopy (LT-STM/S) to elicit how distinct types of defects bring forth scattering potential engineering based on intervalley quantum quasiparticle interference (QPI) in TMDs. Furthermore, quantifying the energy-dependent phase variation of the QPI standing wave reveals the detailed electron-defect interaction between the substitution-induced scattering potential and the carrier transport mechanism. By exploring the intrinsic electronic behavior of atomic-level defects to further understand how defects affect carrier transport in low-dimensional semiconductors, we offer potential technological applications that may contribute to the future expansion of TMDs.