Abstract：
Flexible pressure sensors have attracted great interest due to their bendable, stretchable, and lightweight characteristics compared to rigid pressure sensors. However, the contradictions among sensitivity, detection limit, thickness, and detection range restrict the performance of flexible pressure sensors and the scope of their applications, especially for scenarios requiring conformal fitting, such as rough surfaces such as the human skin. This paper proposes a novel flexible pressure sensor by combining the nanoengineering strategy and nanocomposite structures. The nanoengineering strategy utilizes the bending deformation of nanofilm instead of the compression of the active layer to achieve super high sensitivity and low detection limit; meanwhile, the nanocomposite structures introduce distributed microbumps that delay the adhesion of nanofilm to enlarge the detection range. As a result, this device not only ensures an ultrathin thickness of 1.6 μm and a high sensitivity of 84.29 kPa-1 but also offers a large detection range of 20 kPa and an ultralow detection limit of 0.07 Pa. Owing to the ultrathin thickness as well as high performance, this device promotes applications in detecting fingertip pressure, flexible mechanical gripping, and so on, and demonstrates significant potential in wearable electronics, human-machine interaction, health monitoring, and tactile perception. This device offers a strategy to resolve the conflicts among thickness, sensitivity, detection limit, and detection range; therefore, it will advance the development of flexible pressure sensors and contribute to the community and other related research fields.
摘要：
柔性压力传感器由于其可弯曲性引起了极大的兴趣,可拉伸,和轻量级的特点相比，刚性压力传感器。然而,敏感性之间的矛盾，检测限,厚度,和检测范围限制了柔性压力传感器的性能及其应用范围,特别是对于需要共形拟合的场景，如粗糙的表面，如人体皮肤。本文通过结合纳米工程策略和纳米复合结构，提出了一种新型的柔性压力传感器。纳米工程策略利用纳米薄膜的弯曲变形代替活性层的压缩来实现超高灵敏度和低检测限；同时，纳米复合结构引入分散的微凸点，延迟纳米膜的粘附，扩大检测范围。因此,该装置不仅确保了1.6μm的超薄厚度和84.29kPa-1的高灵敏度，而且还提供了20kPa的大检测范围和0.07Pa的超低检测极限。由于超薄厚度以及高性能，该设备促进了检测指尖压力的应用，灵活的机械夹持，等等，并展示了可穿戴电子产品的巨大潜力，人机交互,健康监测,和触觉感知。该设备提供了一种策略来解决厚度之间的冲突，灵敏度,检测限,和检测范围；因此，它将促进柔性压力传感器的发展，并为社区和其他相关研究领域做出贡献。
