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Abstract：
Vibrational environments can cause drift or changes in Micro-Electro-Mechanical System (MEMS) gyroscope rotor parameters, potentially impacting their performance. To improve the effective use of MEMS gyroscopes, this study introduced a method for evaluating the reliability of parameter degradation under vibration. We analyzed the working principle of MEMS gyroscope rotors and investigated how vibration affects their parameters. Focusing on zero bias and scale factor as key performance indicators, we developed an accelerated degradation model using the distributional assumption method. We then collected degradation data for these parameters under various vibration conditions. Using the Copula function, we established a reliability assessment approach to evaluate the degradation of the MEMS gyroscope rotor\'s zero bias and scale factor under vibration, enabling the determination of reliability for these parameters. Experimental findings confirmed that increasing stress levels lead to reduced failure times and increased failure rates for MEMS gyroscope rotors, with significant changes observed in the zero bias parameter. Our evaluation method effectively characterizes changes in the reliability of the MEMS gyroscope rotor\'s scale factor and zero bias over time, providing valuable information for practical applications of MEMS gyroscopes.
摘要：
振动环境会导致微机电系统(MEMS)陀螺仪转子参数的漂移或变化，可能会影响他们的表现。为了提高MEMS陀螺仪的有效利用,本研究介绍了一种评估振动下参数退化可靠性的方法。我们分析了MEMS陀螺仪转子的工作原理，并研究了振动如何影响其参数。注重零偏差和比例因子作为关键绩效指标,我们使用分布假设方法建立了加速退化模型。然后，我们在各种振动条件下收集了这些参数的退化数据。使用Copula函数，我们建立了一种可靠性评估方法来评估振动下MEMS陀螺仪转子的零偏差和比例因子的退化，能够确定这些参数的可靠性。实验结果证实，增加应力水平导致减少故障时间和增加故障率的MEMS陀螺仪转子，在零偏差参数中观察到显著的变化。我们的评估方法有效地描述了MEMS陀螺仪转子的比例因子和零偏的可靠性随时间的变化，为MEMS陀螺仪的实际应用提供有价值的信息。
