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Abstract：
Micro-Electro-Mechanical System (MEMS) switches have emerged as pivotal components in the realm of miniature electronic devices, promising unprecedented advancements in size, power consumption, and versatility. This literature review paper meticulously examines the key issues and challenges encountered in the development and application of MEMS switches. The comprehensive survey encompasses critical aspects such as material selection, fabrication intricacies, performance metrics including switching time and reliability, and the impact of these switches on diverse technological domains. The review critically analyzes the influence of design parameters, actuation mechanisms, and material properties on the performance of MEMS switches. Additionally, it explores recent advancements, breakthroughs, and innovative solutions proposed by researchers to address these challenges. The synthesis of the existing literature not only elucidates the current state of MEMS switch technology but also paves the way for future research avenues. The findings presented herein serve as a valuable resource for researchers, engineers, and technologists engaged in advancing MEMS switch technology, offering insights into the current landscape and guiding future endeavors in this rapidly evolving field.
摘要：
微机电系统（MEMS）开关已成为微型电子设备领域的关键组件，承诺在规模上取得前所未有的进步，功耗,和多功能性。这篇文献综述论文仔细研究了MEMS开关开发和应用中遇到的关键问题和挑战。全面调查包括关键方面，如材料选择，制造错综复杂，性能指标，包括切换时间和可靠性，以及这些开关对不同技术领域的影响。审查批判性地分析了设计参数的影响，执行机构，和材料特性对MEMS开关性能的影响。此外,它探索了最近的进步，突破,以及研究人员为应对这些挑战而提出的创新解决方案。现有文献的综合不仅阐明了MEMS开关技术的现状，而且为未来的研究途径铺平了道路。本文提出的研究结果为研究人员提供了宝贵的资源，工程师,和技术人员从事推进MEMS开关技术，提供对当前景观的见解，并在这个快速发展的领域指导未来的努力。
