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Abstract：
This study presents a numerical simulation-based investigation of a MEMS (micro-electromechanical systems)technology-based deformable mirror employing a piezoelectric film for fundus examination in adaptive optics. Compared to the classical equal-area electrode arrangement model, we optimize the electrode array for higher-order aberrations. The optimized model centralizes electrodes around the mirror center, which realizes low-voltage driving with high-accuracy correction. The optimized models exhibited commendable correction abilities, achieving a unidirectional displacement of 5.74 μm with a driven voltage of 15 V. The voltage-displacement relationship demonstrated high linearity at 0.99. Furthermore, the deformable mirror\'s influence matrix was computed, aligning with the Zernike standard surface shape of the order 1-3. To quantify aberration correction capabilities, fitting residuals for both models were calculated. The results indicate an average removal of 96.8% of aberrations to the human eye. This underscores that the optimized model outperforms the classical model in correcting high-order aberrations.
摘要：
这项研究提出了基于MEMS（微机电系统）技术的可变形镜的基于数值模拟的研究，该可变形镜采用压电膜在自适应光学中进行眼底检查。与经典的等面积电极排列模型相比，我们优化了电极阵列的高阶像差。优化后的模型将电极集中在反射镜中心周围，实现了低电压驱动和高精度校正。优化后的模型表现出良好的校正能力，在15V的驱动电压下实现5.74μm的单向位移。电压-位移关系在0.99处显示出高线性。此外，计算了可变形镜的影响矩阵，与订单1-3的Zernike标准表面形状对齐。为了量化像差校正能力，计算了两个模型的拟合残差。结果表明，人眼平均消除了96.8%的像差。这强调了优化模型在校正高阶像差方面优于经典模型。
