关键词: in situ transmission electron microscopy ETEM MEM closed (sealed) gas cell differential pumping environmental cell

来  源:   DOI:10.1093/jmicro/dfad055

Abstract:
During the in situ transmission electron microscopy (TEM) observations, the diverse functionalities of different specimen holders play a crucial role. We hereby provide a comprehensive overview of the main types of holders, associated technologies and case studies pertaining to the widely employed heating and gas heating methods, from their initial developments to the latest advancement. In addition to the conventional approaches, we also discuss the emergence of holders that incorporate a micro-electro-mechanical system (MEMS) chip for in situ observations. The MEMS technology offers a multitude of functions within a single chip, thereby enhancing the capabilities and versatility of the holders. MEMS chips have been utilized in environmental-cell designs, enabling customized fabrication of diverse shapes. This innovation has facilitated their application in conducting in situ observations within gas and liquid environments, particularly in the investigation of catalytic and battery reactions. We summarize recent noteworthy studies conducted using in situ liquid TEM. These studies highlight significant advancements and provide valuable insights into the utilization of MEMS chips in environmental-cells, as well as the expanding capabilities of in situ liquid TEM in various research domains.
摘要:
在原位透射电子显微镜(TEM)观察期间,不同的样品架的不同功能起着至关重要的作用。我们在此提供主要类型的持有人的全面概述,与广泛使用的加热和气体加热方法有关的相关技术和案例研究,从最初的发展到最近的进步。除了传统的方法,我们还讨论了采用微机电系统(MEMS)芯片进行原位观察的支架的出现。MEMS技术在单个芯片内提供多种功能,从而增强了保持器的能力和多功能性。MEMS芯片已用于环境电池设计,使定制制造不同的形状。这项创新促进了它们在气体和液体环境中进行原位观测的应用,特别是在催化和电池反应的研究中。我们总结了最近使用原位液体TEM进行的值得注意的研究。这些研究突出了重大进步,并为MEMS芯片在环境电池中的利用提供了有价值的见解。以及原位液体TEM在各种研究领域的扩展能力。
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