PDF(Sci-hub)
Abstract：
The development of the femtosecond laser (fs laser) with its ability to provide extremely rapid athermal ablation of materials has initiated a renaissance in materials science. Sample milling rates for the fs laser are orders of magnitude greater than that of traditional focused ion beam (FIB) sources currently used. In combination with minimal surface post-processing requirements, this technology is proving to be a game changer for materials research. The development of a femtosecond laser attached to a focused ion beam scanning electron microscope (LaserFIB) enables numerous new capabilities, including access to deeply buried structures as well as the production of extremely large trenches, cross sections, pillars and TEM H-bars, all while preserving microstructure and avoiding or reducing FIB polishing. Several high impact applications are now possible due to this technology in the fields of crystallography, electronics, mechanical engineering, battery research and materials sample preparation. This review article summarizes the current opportunities for this new technology focusing on the materials science megatrends of engineering materials, energy materials and electronics.
摘要：
飞秒激光器（fs激光器）的发展具有对材料进行极快的无热烧蚀的能力，这引发了材料科学的复兴。fs激光器的样品铣削速率比当前使用的传统聚焦离子束（FIB）源的数量级大。结合最小的表面后处理要求，这项技术被证明是材料研究的游戏规则改变者。与聚焦离子束扫描电子显微镜（LaserFIB）相连的飞秒激光器的开发使许多新功能得以实现，包括进入深埋结构以及生产非常大的沟槽，横截面,柱和TEMH形棒，同时保留微观结构并避免或减少FIB抛光。由于该技术在晶体学领域中的应用，现在可以实现几种高影响的应用。电子,机械工程,电池研究和材料样品制备。这篇综述文章总结了这项新技术的当前机遇，重点是工程材料的材料科学大趋势，能源材料和电子。
